Browsing by Author "Song, Yoon J."
Now showing 1 - 2 of 2
Results Per Page
Sort Options
- Improvement in the electrical properties in Pt/Pb(Zr0.52Ti0.48)O-3/Pt ferroelectric capacitors using a wet cleaning methodLee, June K.; Park, Youngsoo; Chung, Ilsub; Oh, Sang Jeong; Jung, Dong J.; Song, Yoon J.; Koo, Bon J.; Lee, Sung Y.; Kim, Kinam; Desu, Seshu B. (American Institute of Physics, 1999-12-01)A wet cleaning solution was designed to specifically eliminate nonferroelectric phases, such as pyrochlore, PbO, and the etching damaged layer. Scanning electron microscopy pictures clearly showed that treatment with the cleaning solution completely removed these nonferroelectric phases. After removing the nonferroelectric phases, ferroelectric properties such as remnant polarization, coercive voltage, and leakage current, were remarkably improved. In addition, the wet cleaned ferroelectric capacitors yielded superior endurance against hydrogen-induced damage compared to those of the noncleaned capacitors. (C) 1999 American Institute of Physics. [S0021-8979(99)02622-5].
- Laser-assisted low temperature processing of Pb(Zr, Ti)O-3 thin filmZhu, Y. F.; Zhu, J. S.; Song, Yoon J.; Desu, Seshu B. (AIP Publishing, 1998-10-01)A method for lowering the processing temperature of PbZr1-xTixO3 films was developed utilizing a laser- assisted two- step process. In the first step, perovskite phase was initiated in the PZT films to a furnace anneal at low temperatures in the range of 470-550 degrees C, depending on the Zr/Ti ratio. Later, the films were laser annealed (using KrF excimer laser) at room temperature to grow the perovskite phase, and to improve microstructure and ferroelectric properties. It was found that this two-step process was very effective in producing excellent quality ferroelectric PZT films at low temperatures. It should be noted that although laser annealing of amorphous and/or pyrochlore films directly (one-step process) produced perovskite phase, the ferroelectric properties of these films, irrespective of the composition, were rather unattractive. Some possible reasons for the ineffectiveness of the one-step process were discussed. (C) 1998 American Institute of Physics. [S0003-6951(98)02640-0].