Browsing Scholarly Works, Materials Science and Engineering (MSE) by Subject "257/E21.011"

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    • Metalorganic chemical vapor deposition of layered structure oxides 

      Materials Science and Engineering (MSE); Cedraeus Incorporated; Virginia Tech Intellectual Properties, Inc.; Sharp Kabushiki Kaisha; Desu, Seshu B.; Li, Tingkai; Tao, Wei; Peng, Chien Hsiung; Zhu, Yongfei (United States Patent and Trademark Office, 1996-06-18)
      A method of fabricating high quality layered structure oxide ferroelectric thin films. The deposition process is a chemical vapor deposition process involving chemical reaction between volatile metal organic compounds of ...

    • Reactive ion etching of lead zirconate titanate and ruthenium oxide thin films 

      Electrical and Computer Engineering; Materials Science and Engineering (MSE); Cedraeus Incorporated; Virginia Tech Intellectual Properties, Inc.; Sharp Kabushiki Kaisha; Desu, Seshu B.; Pan, Wei; Vijay, Dilip P. (United States Patent and Trademark Office, 1996-03-05)
      A method of reactive ion etching both a lead zirconate titanate ferroelectric dielectric and a RuO.sub.2 electrode, and a semiconductor device produced in accordance with such process. The dielectric and electrode are ...