We have studied the deposition of BaTiO3 (BTO) thin films on various substrates. Three representative substrates were selected from different types of material systems: (i) SrTiO3 single crystals as a typical oxide, (ii) Si wafers as a semiconductor, and (iii) Ni foils as a magnetostrictive metal. We have compared the ferroelectric properties of BTO thin films obtained by pulsed laser deposition on these diverse substrates.