Degradation in lead zirconate titanate thin film capacitors for non-volatile memory applications

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dc.contributor.authorBhattacharya, Mayukhen
dc.contributor.committeecochairDesu, Seshu B.en
dc.contributor.committeecochairMoore, David J.en
dc.contributor.committeememberAthanas, Peter M.en
dc.contributor.departmentElectrical Engineeringen
dc.date.accessioned2014-03-14T21:44:40Zen
dc.date.adate2009-09-05en
dc.date.available2014-03-14T21:44:40Zen
dc.date.issued1994-07-05en
dc.date.rdate2009-09-05en
dc.date.sdate2009-09-05en
dc.description.abstractA study of the degradation of ferroelectric properties in Lead Zirconate Titanate (PZT) thin film capacitors is presented in this work. Metal- Ferroelectric - Metal capacitors were prepared by sputtering and metal organic decomposition (MOD) techniques. Samples with several different film thicknesses were considered in this study. Depolarization, leading to imprint has been studied at various temperatures. Changes in the dielectric properties of the capacitors as a function of the number of fatigue cycles is presented. Impedance and modulus spectroscopic techniques have been applied to study the effect of degradation on the ferroelectric thin film. It has been shown that with accurate low frequency impedance measurement equipment, new insight can be gained on the mechanisms of degradation in ferroelectric capacitors.en
dc.description.degreeMaster of Scienceen
dc.format.extentix, 86 leavesen
dc.format.mediumBTDen
dc.format.mimetypeapplication/pdfen
dc.identifier.otheretd-09052009-040636en
dc.identifier.sourceurlhttp://scholar.lib.vt.edu/theses/available/etd-09052009-040636/en
dc.identifier.urihttp://hdl.handle.net/10919/44583en
dc.language.isoenen
dc.publisherVirginia Techen
dc.relation.haspartLD5655.V855_1994.B539.pdfen
dc.relation.isformatofOCLC# 31256882en
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subject.lccLD5655.V855 1994.B539en
dc.subject.lcshCapacitorsen
dc.subject.lcshFerroelectric storage cellsen
dc.subject.lcshFerroelectric thin filmsen
dc.titleDegradation in lead zirconate titanate thin film capacitors for non-volatile memory applicationsen
dc.typeThesisen
dc.type.dcmitypeTexten
thesis.degree.disciplineElectrical Engineeringen
thesis.degree.grantorVirginia Polytechnic Institute and State Universityen
thesis.degree.levelmastersen
thesis.degree.nameMaster of Scienceen

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