Fundamental mechanisms of focused ion beam guided anodization

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dc.contributorVirginia Tech. Department of Materials Science and Engineeringen
dc.contributor.authorTian, Zhipengen
dc.contributor.authorLu, Kathyen
dc.contributor.authorChen, Boen
dc.contributor.departmentMaterials Science and Engineering (MSE)en
dc.date.accessed2015-04-24en
dc.date.accessioned2015-05-21T19:47:24Zen
dc.date.available2015-05-21T19:47:24Zen
dc.date.issued2010-11-01en
dc.description.abstractThis paper is focused on understanding the fundamental mechanisms of focused ion beam guided anodization and the unique capabilities of generating new patterns based on such an understanding. By designing proper interpore distance, pore arrangement, and pore shape during focused ion beam patterning, nonspherical pore shape and nonhexagonal patterns can be obtained by further anodization. The electrical field and the mechanical stress field around each focused ion beam patterned concave dictate the pore formation and growth. The oxide barrier layer thickness and shape around the focused ion beam guided pores affect new pore formation and the meshing of different size pores. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3500513]en
dc.description.sponsorshipNational Science Foundation (U.S.) - Grant No. CMMI-0824741en
dc.description.sponsorshipVirginia Tech. Institute for Critical Technology and Applied Scienceen
dc.format.extent8 pagesen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationTian, Zhipeng, Lu, Kathy, Chen, Bo (2010). Fundamental mechanisms of focused ion beam guided anodization. Journal of Applied Physics, 108(9). doi: 10.1063/1.3500513en
dc.identifier.doihttps://doi.org/10.1063/1.3500513en
dc.identifier.issn0021-8979en
dc.identifier.urihttp://hdl.handle.net/10919/52426en
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/108/9/10.1063/1.3500513en
dc.language.isoen_USen
dc.publisherAmerican Institute of Physicsen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectFocused ion beam technologyen
dc.subjectSurface patterningen
dc.subjectAluminiumen
dc.subjectElectrolytesen
dc.subjectDissolutionen
dc.titleFundamental mechanisms of focused ion beam guided anodizationen
dc.title.serialJournal of Applied Physicsen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten

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