Method Of Multiple References For 3D Imaging with Fourier Transform Interferometry

This letter presents an improved phase referencing technique, called Method of Multiple References, for optical profilometry. Based on a lookup table, the method eliminates several major drawbacks of single-reference Fourier Transform Interferometry by enabling surface error correction for steep slopes and step discontinuities, and by allowing mapping of multiple discrete objects using a single image set. The algorithm is tested using a fiber optic coupler-based FTI system and shown to have RMS surface error less than 0.03mm. (C) 2010 Optical Society of America