A pressure gauge based on gas density measurement from analysis of the thermal noise of an atomic force microscope cantilever

Simple item page
dc.contributorVirginia Techen
dc.contributor.authorSeo, Dongjinen
dc.contributor.authorPaul, Mark R.en
dc.contributor.authorDucker, William A.en
dc.contributor.departmentMechanical Engineeringen
dc.contributor.departmentChemical Engineeringen
dc.date.accessed2014-01-25en
dc.date.accessioned2014-01-23T13:49:10Zen
dc.date.available2014-01-23T13:49:10Zen
dc.date.issued2012-05-01en
dc.description.abstractWe describe a gas-density gauge based on the analysis of the thermally-driven fluctuations of an atomic force microscope (AFM) cantilever. The fluctuations are modeled as a ring-down of a simple harmonic oscillator, which allows fitting of the resonance frequency and damping of the cantilever, which in turn yields the gas density. The pressure is obtained from the density using the known equation of state. In the range 10-220 kPa, the pressure readings from the cantilever gauge deviate by an average of only about 5% from pressure readings on a commercial gauge. The theoretical description we use to determine the pressure from the cantilever motion is based upon the continuum hypothesis, which sets a minimum pressure for our analysis. It is anticipated that the cantilever gauge could be extended to measure lower pressures given a molecular theoretical description. Alternatively, the gauge could be calibrated for use in the non-continuum range. Our measurement technique is similar to previous AFM cantilever measurements, but the analysis produces improved accuracy. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4717678]en
dc.description.sponsorshipNational Science Foundation CBET-0959228en
dc.description.sponsorshipVirginia Techen
dc.identifier.citationSeo, Dongjin; Paul, Mark R.; Ducker, William A., "A pressure gauge based on gas density measurement from analysis of the thermal noise of an atomic force microscope cantilever," Rev. Sci. Instrum. 83, 055005 (2012); http://dx.doi.org/10.1063/1.4717678en
dc.identifier.doihttps://doi.org/10.1063/1.4717678en
dc.identifier.issn0034-6748en
dc.identifier.urihttp://hdl.handle.net/10919/25134en
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/rsi/83/5/10.1063/1.4717678en
dc.language.isoen_USen
dc.publisherAIP Publishingen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectMicrocantileversen
dc.subjectVacuumen
dc.subjectFluiden
dc.subjectRangeen
dc.subjectAiren
dc.titleA pressure gauge based on gas density measurement from analysis of the thermal noise of an atomic force microscope cantileveren
dc.title.serialReview of Scientific Instrumentsen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten

Files

Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
1.4717678.pdf
Size:
447.51 KB
Format:
Adobe Portable Document Format
Description:
Main article
Download

Collections

Scholarly Works, Chemical Engineering
Scholarly Works, Mechanical Engineering