Now showing items 1-2 of 2

    • Impact of Lot Dedication on the Performance of the Fab 

      Kidambi, Madhav (Virginia Tech, 2001-12-06)
      Photolithography is the most complex of the operations involved in the fabrication of a wafer, and it requires the greatest precision. Photolithography is used to create multiple layers of circuit patterns on a chip. ...
    • A Mathematical Programming Based Procedure for the Scheduling of Lots in a Wafer Fab 

      Shenai, Vinod Dattaram (Virginia Tech, 2001-09-21)
      The semiconductor industry provides a host of very challenging problems in production planning and scheduling because of the unique features of the wafer fab. This research addresses the need to develop an approach, which ...