Now showing items 1-2 of 2

    • Metalorganic chemical vapor deposition of layered structure oxides 

      Sharp Kabushiki; Cedraeus Incorporated; Virginia Polytechnic Institute and State University; Desu, Seshu B.; Tao, W. (United States Patent and Trademark Office, 1995-12-26)
      A method of fabricating high quality layered structure oxide ferroelectric thin films. The deposition process is a chemical vapor deposition process involving chemical reaction between volatile metal organic compounds of ...
    • Reactive ion etching of lead zirconate titanate and ruthenium oxide thin films 

      Cedraeus Incorporated; Virginia Tech Intellectual Properties, Inc.; Sharp Kabushiki Kaisha; Desu, Seshu B.; Pan, Wei; Vijay, Dilip P. (United States Patent and Trademark Office, 1996-03-05)
      A method of reactive ion etching both a lead zirconate titanate ferroelectric dielectric and a RuO.sub.2 electrode, and a semiconductor device produced in accordance with such process. The dielectric and electrode are ...