Now showing items 1-2 of 2

    • Metalorganic chemical vapor deposition of layered structure oxides 

      Sharp Kabushiki; Cedraeus Incorporated; Virginia Polytechnic Institute and State University; Desu, Seshu B.; Tao, W. (United States Patent and Trademark Office, 1995-12-26)
      A method of fabricating high quality layered structure oxide ferroelectric thin films. The deposition process is a chemical vapor deposition process involving chemical reaction between volatile metal organic compounds of ...
    • Method of forming multilayered electrodes for ferroelectric devices consisting of conductive layers and interlayers formed by chemical reaction 

      Cedraeus Incorporated; Virginia Polytechnic Institute and State University; Sharp Kabushiki Kaisha; Desu, Seshu B.; Yoo, In Kyung; Kwok, Chi Kong; Vijay, Dilip P. (United States Patent and Trademark Office, 1996-02-13)
      A ferroelectric device is constructed using a bottom electrode composed of a conducting oxide such as RuO.sub.x, on a substrate such as silicon or silicon dioxide. A ferroelectric material such as lead zirconate titanate ...