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    • Metalorganic chemical vapor deposition of layered structure oxides 

      Sharp Kabushiki; Cedraeus Incorporated; Virginia Polytechnic Institute and State University; Desu, Seshu B.; Tao, W. (United States Patent and Trademark Office, 1995-12-26)
      A method of fabricating high quality layered structure oxide ferroelectric thin films. The deposition process is a chemical vapor deposition process involving chemical reaction between volatile metal organic compounds of ...