Vacuum response and gas leak detection in piezoelectrically driven sound-resonance cavity
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TR Number
Date
2004-05-01
Journal Title
Journal ISSN
Volume Title
Publisher
AIP Publishing
Abstract
It has been found that a piezoelectrically driven sound-resonance cavity (PSRC) is quite sensitive to low-pressure changes: a change from ambient to vacuum (67 Pa) conditions results in a 89degrees phase shift and a -81% voltage decrease. Under vacuum conditions, the PSRC is highly sensitive (similar to7 ppm) to leakage of H-2 gas. (C) 2004 American Institute of Physics.
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Keywords
Sensors, Physics
Citation
Dong, SX; Bai, FM; Yan, L; et al., "Vacuum response and gas leak detection in piezoelectrically driven sound-resonance cavity," Appl. Phys. Lett. 84, 4144 (2004); http://dx.doi.org/10.1063/1.1751217