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dc.contributorVirginia Techen_US
dc.contributor.authorDong, Shuxiangen_US
dc.contributor.authorBai, Feimingen_US
dc.contributor.authorYan, Lien_US
dc.contributor.authorCao, Huen_US
dc.contributor.authorLi, Jiefangen_US
dc.contributor.authorViehland, Dwight D.en_US
dc.date.accessioned2014-02-03T15:57:19Z
dc.date.available2014-02-03T15:57:19Z
dc.date.issued2004-05-01
dc.identifier.citationDong, SX; Bai, FM; Yan, L; et al., "Vacuum response and gas leak detection in piezoelectrically driven sound-resonance cavity," Appl. Phys. Lett. 84, 4144 (2004); http://dx.doi.org/10.1063/1.1751217
dc.identifier.issn0003-6951
dc.identifier.urihttp://hdl.handle.net/10919/25282
dc.description.abstractIt has been found that a piezoelectrically driven sound-resonance cavity (PSRC) is quite sensitive to low-pressure changes: a change from ambient to vacuum (67 Pa) conditions results in a 89degrees phase shift and a -81% voltage decrease. Under vacuum conditions, the PSRC is highly sensitive (similar to7 ppm) to leakage of H-2 gas. (C) 2004 American Institute of Physics.
dc.format.mimetypeapplication/pdfen_US
dc.language.isoen_US
dc.publisherAIP Publishing
dc.subjectSensorsen_US
dc.subjectPhysicsen_US
dc.titleVacuum response and gas leak detection in piezoelectrically driven sound-resonance cavityen_US
dc.typeArticle - Refereeden_US
dc.contributor.departmentMaterials Science and Engineering (MSE)en_US
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/apl/84/21/10.1063/1.1751217
dc.date.accessed2014-01-24
dc.title.serialApplied Physics Letters
dc.identifier.doihttps://doi.org/10.1063/1.1751217
dc.type.dcmitypeTexten_US


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