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dc.contributor.authorBemben, Richard Matthewen_US
dc.date.accessioned2014-03-14T20:37:44Z
dc.date.available2014-03-14T20:37:44Z
dc.date.issued2005-05-04en_US
dc.identifier.otheretd-05202005-165204en_US
dc.identifier.urihttp://hdl.handle.net/10919/33031
dc.description.abstractEngineering faculty and administration at the Virginia Polytechnic Institute and State University (Virginia Tech) have recognized the importance of producing competent scientists and engineers to work in the vast semiconductor industry, especially in the emerging technologies of microelectronics, optoelectronics, and nanotechnology. For this reason, the development of an undergraduate microelectronics minor as well as a more rigorous graduate curriculum has been actively pursued for several years. This paper details the development of an advanced semiconductor processing laboratory course, which serves as a three credit hour capstone course. The course covers circuit layout, semiconductor fabrication, and electrical testing. The following steps were taken in order to accomplish this task: choosing and customizing a computer aided design (CAD) software package for device layout, pMOS process integration on the toolset in the cleanroom facilities at Virginia Tech, and the development of a laboratory manual.en_US
dc.publisherVirginia Techen_US
dc.relation.haspartThesis_Bemben.pdfen_US
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectsemiconductor processing; VTPMOS; advanced laboraten_US
dc.titleDevelopment of an Advanced Semiconductor Laboratoryen_US
dc.typeThesisen_US
dc.contributor.departmentElectrical and Computer Engineeringen_US
dc.description.degreeMaster of Scienceen_US
thesis.degree.nameMaster of Scienceen_US
thesis.degree.levelmastersen_US
thesis.degree.grantorVirginia Polytechnic Institute and State Universityen_US
thesis.degree.disciplineElectrical and Computer Engineeringen_US
dc.contributor.committeememberTront, Joseph G.en_US
dc.identifier.sourceurlhttp://scholar.lib.vt.edu/theses/available/etd-05202005-165204/en_US
dc.contributor.committeecochairMeehan, Kathleenen_US
dc.contributor.committeecochairHendricks, Robert W.en_US
dc.date.sdate2005-05-20en_US
dc.date.rdate2005-06-28
dc.date.adate2005-06-28en_US


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