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dc.contributor.authorZareian-Jahromi, Mohammad Aminen_US
dc.date.accessioned2014-03-14T20:39:25Z
dc.date.available2014-03-14T20:39:25Z
dc.date.issued2009-05-22en_US
dc.identifier.otheretd-06052009-023407en_US
dc.identifier.urihttp://hdl.handle.net/10919/33433
dc.description.abstractThis work is focused on the design, fabrication and characterization of high performance MEMS-based micro gas chromatography columns having wide range of applications in the pharmaceutical industry, environmental monitoring, petroleum distillation, clinical chemistry, and food processing. The first part of this work describes different approaches to achieve high-performance microfabricated silicon-glass separation columns for micro gas chromatographic (µGC) systems. The capillary width effect on the separation performance has been studied by characterization of 250 µm-, 125 µm-, 50 µm-, and 25 µm-wide single-capillary columns (SCCs) fabricated on a 10à 8 mm2 die. The plate number of 12500/m has been achieved by 25 µm-wide columns coated by a thin layer of polydimethylsiloxane stationary phase using static coating technique. To address the low sample capacity of these narrow columns, this work presents the first generation of MEMS-based â multicapillaryâ columns (MCCs) consisting of a bundle of narrow-width rectangular capillaries working in parallel. The second contribution of this work is the first MEMS-based stationary phase coating technique called monolayer protected gold (MPG) for ultra-narrow single capillary (SCC) and multicapillary (MCC) microfabricated gas chromatography (μGC) columns yielding the highest separation performance reported to date. This new μGC stationary phase has been achieved by electrodepositing a uniform functionalized gold layer with an adjustable thickness (250nm-2µm) in 25μm-wide single columns as well as in four-capillary MCCs. The separation performance, stability, reproducibility and bleeding of the stationary phase have been evaluated over time by separating n-alkanes as non-polar and alcohols as polar gas mixtures.en_US
dc.publisherVirginia Techen_US
dc.relation.haspartMaster_Thesis_Final_Submitted_7_20_2009.pdfen_US
dc.rightsI hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. I hereby grant to Virginia Tech or its agents the non-exclusive license to archive and make accessible, under the conditions specified below, my thesis, dissertation, or project report in whole or in part in all forms of media, now or hereafter known. I retain all other ownership rights to the copyright of the thesis, dissertation or project report. I also retain the right to use in future works (such as articles or books) all or part of this thesis, dissertation, or project report.en_US
dc.subjectMEMSen_US
dc.subjectNanotechnologyen_US
dc.subjectcoating techniquesen_US
dc.subjectmono layer protected golden_US
dc.subjectgad chromatographyen_US
dc.titleMEMS-Based Micro Gas Chromatography: Design, Fabrication and Characterizationen_US
dc.typeThesisen_US
dc.contributor.departmentElectrical and Computer Engineeringen_US
thesis.degree.nameMaster of Scienceen_US
thesis.degree.levelmastersen_US
thesis.degree.grantorVirginia Polytechnic Institute and State Universityen_US
dc.contributor.committeechairAgah, Masouden_US
dc.contributor.committeememberRaman, Sanjayen_US
dc.contributor.committeememberMeehan, Kathleenen_US
dc.contributor.committeememberLu, Guo-Quanen_US
dc.identifier.sourceurlhttp://scholar.lib.vt.edu/theses/available/etd-06052009-023407/en_US
dc.date.sdate2009-06-05en_US
dc.date.rdate2010-07-21
dc.date.adate2009-07-21en_US


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