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dc.contributor.authorHand, Davis Kyleen
dc.date.accessioned2014-03-14T20:40:46Zen
dc.date.available2014-03-14T20:40:46Zen
dc.date.issued2011-01-18en
dc.identifier.otheretd-06282011-131050en
dc.identifier.urihttp://hdl.handle.net/10919/33804en
dc.description.abstractX-ray Computed Tomography (CT) is a process that produces three-dimensional x-ray images, allowing for better diagnosis and analysis of complex internal medical conditions. New advances in the optical techniques used in this process promise to produce better results while reducing patient risk. One of these developments calls for precise optical gratings that can be expensive and difficult to manufacture. This paper presents a simple process developed specifically for the production of these gratings using cost effective techniques. The process uses well understood semiconductor fabrication steps including oxidation, deep reactive ion etching and electroplating. While not entirely successful, the process presented within provides a proof of concept for development of the gratings and discusses improvements that could be made to allow for success.en
dc.publisherVirginia Techen
dc.relation.haspartHand_DK_T_2011.pdfen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectComputed Tomographyen
dc.subjectPhotolithographyen
dc.subjectElectroplatingen
dc.subjectDRIEen
dc.titleA Manufacturing Process for Single Micron Resolution Optical Gratings Used in X-ray Computed Tomographyen
dc.typeThesisen
dc.contributor.departmentElectrical and Computer Engineeringen
dc.description.degreeMaster of Scienceen
thesis.degree.nameMaster of Scienceen
thesis.degree.levelmastersen
thesis.degree.grantorVirginia Polytechnic Institute and State Universityen
thesis.degree.disciplineElectrical and Computer Engineeringen
dc.contributor.committeechairMeehan, Kathleenen
dc.contributor.committeememberWyatt, Christopher L.en
dc.contributor.committeememberOrlowski, Mariusen
dc.identifier.sourceurlhttp://scholar.lib.vt.edu/theses/available/etd-06282011-131050/en
dc.date.sdate2011-06-28en
dc.date.rdate2011-08-17en
dc.date.adate2011-08-17en


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