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dc.contributor.authorWang, Xingweien_US

Miniature pressure sensors which can endure harsh environments are a highly sought after goal in industrial, medical and research fields. Microelectromechanical systems (MEMS) are the current methods to fabricate such small sensors. However, they suffer from low sensitivity and poor mechanical properties.

To fulfill the need for robust and reliable miniature pressure sensors that can operate under high temperatures, a novel type of optical fiber tip sensor only 125μm in diameter is presented in this thesis. The essential element is a piece of hollow fiber which connects the fiber end and a diaphragm to form a Fabry-Pérot cavity. The all-fused-silica structure fabricated directly on a fiber tip has little temperature dependence and can function very well with high resolution and accuracy at temperatures up to 600ï °C. In addition to its miniature size, its advantages include superior mechanical properties, biocompatibility, immunity to electromagnetic interference, disposability and cost-effective fabrication.

The principle of operation, design analysis, fabrication implementation and performance evaluation of the sensor are discussed in detail in the following chapters.

dc.publisherVirginia Techen_US
dc.rightsI hereby certify that, if appropriate, I have obtained and attached hereto a written permission statement from the owner(s) of each third party copyrighted matter to be included in my thesis, dissertation, or project report, allowing distribution as specified below. I certify that the version I submitted is the same as that approved by my advisory committee. I hereby grant to Virginia Tech or its agents the non-exclusive license to archive and make accessible, under the conditions specified below, my thesis, dissertation, or project report in whole or in part in all forms of media, now or hereafter known. I retain all other ownership rights to the copyright of the thesis, dissertation or project report. I also retain the right to use in future works (such as articles or books) all or part of this thesis, dissertation, or project report.en_US
dc.subjectoptical fiber tip pressure sensoren_US
dc.subjectFabry-Perot interferometryen_US
dc.titleOptical Fiber Tip Pressure Sensoren_US
dc.contributor.departmentElectrical and Computer Engineeringen_US
dc.description.degreeMaster of Scienceen_US
thesis.degree.nameMaster of Scienceen_US
thesis.degree.grantorVirginia Polytechnic Institute and State Universityen_US
thesis.degree.disciplineElectrical and Computer Engineeringen_US
dc.contributor.committeechairWang, Anboen_US
dc.contributor.committeememberLiu, Yiluen_US
dc.contributor.committeememberPickrell, Gary R.en_US

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