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dc.contributorVirginia Tech. Department of Materials Engineeringen_US
dc.contributor.authorRao, Satish I.en_US
dc.contributor.authorHouska, Charles R.en_US
dc.date.accessioned2015-05-21T19:47:26Z
dc.date.available2015-05-21T19:47:26Z
dc.date.issued1983
dc.identifier.citationRao, S., Houska, C. R. (1983). Quantitative analysis of fiber texture in cubic films. Journal of Applied Physics, 54(4), 1872-1882. doi: 10.1063/1.332240en_US
dc.identifier.issn0021-8979en_US
dc.identifier.urihttp://hdl.handle.net/10919/52439
dc.description.abstractThe method of Roe and Krigbaum for determining fiber texture has been extended to thin film applications. It is often desirable to make i n s i t u pole density measurements of a film on a thick substrate. This does not permit complete data to be collected by x‐ray transmission techniques. If the data are restricted to the range 0≤χ≤75°, obtained by reflection, incomplete pole density plots are obtained, and it is necessary to devise a self‐consistent extrapolation technique that extends the pole density data to 90°. This requires least‐squares fitting over the range from χ=0 to 75° and an iterative procedure for extrapolating with functions consistent with a single orientation function. The example of a 1.14‐μ Mo film on a (111) Si substrate requires an expansion of the symmetry relations to order 46. The procedure established herein is readily extended to include the effect of static displacements resulting from embedded gas atoms that are associated with sputtered films.en_US
dc.description.sponsorshipNational Science Foundation (U.S.) - Grant No. DMR-S000933en_US
dc.format.extent12 pagesen_US
dc.format.mimetypeapplication/pdfen_US
dc.language.isoen_USen_US
dc.publisherAmerican Institute of Physicsen_US
dc.subjectThin film textureen_US
dc.subjectDensity measurementen_US
dc.subjectMolybdenumen_US
dc.subjectSputter depositionen_US
dc.titleQuantitative analysis of fiber texture in cubic filmsen_US
dc.typeArticle - Refereeden_US
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/54/4/10.1063/1.332240en_US
dc.date.accessed2015-04-24en_US
dc.title.serialJournal of Applied Physicsen_US
dc.identifier.doihttps://doi.org/10.1063/1.332240
dc.type.dcmitypeTexten_US


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