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Stress-controlled Pb(Zr0.52Ti0.48)O-3 thick films by thermal expansion mismatch between substrate and Pb(Zr0.52Ti0.48)O-3 film71

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Stress-controlled Pb(Zr0.52Ti0.48)O-3 thick films by thermal expansion mismatch between substrate and Pb(Zr0.52Ti0.48)O-3 film2201202

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