Now showing items 1-2 of 2
(United States Patent and Trademark Office, 1999-03-23)
A device and method for flash evaporating a reagent includes an evaporation chamber that houses a dome on which evaporation occurs. The dome is solid and of high thermal conductivity and mass, and may be heated to a ...
Dry etching of layer structure oxides
(United States Patent and Trademark Office, 1999-02-23)
A method of patterning layered structure oxide thin films involving placing the layered structure thin film (with or without a mask) laid on a substrate into a chamber which is partially filled with CHC1FCF.sub.3 gas and ...