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dc.date.accessioned2016-08-24T17:54:02Z
dc.date.available2016-08-24T17:54:02Z
dc.date.issued1999-01-26
dc.identifier.urihttp://hdl.handle.net/10919/72379
dc.description.abstractProcesses for providing a durable glass dielectric layer on an electrically conductive substrate are disclosed. Also disclosed are electrostatic chucks made by the process that include an electrically conductive substrate coated with a layer of glass having a composition that includes 60 wt. % to 80 wt. % SiO.sub.2.
dc.format.mimetypeapplication/pdf
dc.language.isoen_USen_US
dc.publisherUnited States Patent and Trademark Office
dc.titleProcess for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process
dc.typePatent
dc.identifier.urlhttp://pimg-fpiw.uspto.gov/fdd/59/644/058/0.pdf
dc.date.accessed2016-08-19
dc.type.dcmitypeText
dc.contributor.assigneeVirginia Tech Intellectual Properties, Inc.
dc.contributor.inventorLu, Guo-Quan
dc.contributor.inventorBang, Jaecheol
dc.date.filed1996-08-14
dc.identifier.applicationnumber8700605
dc.subject.uspc279/128
dc.subject.uspcother361/234
dc.subject.cpcH01L21/6831
dc.subject.cpcH01L21/6833
dc.subject.cpcH02N13/00
dc.subject.cpcY10T279/23
dc.type.patenttypeutility
dc.identifier.patentnumber5864459


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