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dc.date.accessioned2016-08-24T17:54:48Z
dc.date.available2016-08-24T17:54:48Z
dc.date.issued2009-02-24
dc.identifier.urihttp://hdl.handle.net/10919/72595
dc.description.abstractA fiber optic sensor includes at least two Fabry-Perot (FP cavities) defined by at least three partially reflecting surfaces which individually and together are capable of generating different interference spectra which are affected by temperature. One of the FP cavities is formed at an end of the sensor and includes a surface which is capable of supporting a thin film, the optical thickness of which is to be measured. The other FP cavity between the lead-in fiber and the first FP cavity thus does not include the film and can thus independently provide highly accurate temperature information for calibrating the optical length of the second FP cavity and compensation for temperature effects on measurement of the thin film supported thereon, preferably by subtraction of a calibrated temperature-dependent change in optical length of the second FP cavity from the measurement made.
dc.format.mimetypeapplication/pdf
dc.language.isoen_USen_US
dc.publisherUnited States Patent and Trademark Office
dc.titleMulti-cavity Fabry-Perot interferometric thin-film sensor with built-in temperature compensation
dc.typePatent
dc.identifier.urlhttp://pimg-fpiw.uspto.gov/fdd/72/957/074/0.pdf
dc.date.accessed2016-08-19
dc.type.dcmitypeText
dc.contributor.assigneeVirginia Tech Intellectual Properties, Inc.
dc.contributor.inventorWang, Anbo
dc.contributor.inventorZhang, Yan Ryan
dc.contributor.inventorCooper, Kristie L.
dc.date.filed2006-04-28
dc.identifier.applicationnumber11413119
dc.subject.uspc356/503
dc.subject.uspcother356/480
dc.subject.uspcother356/519
dc.subject.uspcother356/630
dc.subject.cpcG01B11/0675
dc.subject.cpcG01N21/45
dc.subject.cpcG01N21/7746
dc.subject.cpcG01B2290/25
dc.subject.cpcG01N21/39
dc.subject.cpcG01N2021/7773
dc.subject.cpcG01N2021/7779
dc.type.patenttypeutility
dc.identifier.patentnumber7495772


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