Show simple item record

dc.contributor.authorDaniel, Monisha Gnanachandraen_US
dc.date.accessioned2017-06-29T08:01:03Z
dc.date.available2017-06-29T08:01:03Z
dc.date.issued2017-06-28en_US
dc.identifier.othervt_gsexam:11571en_US
dc.identifier.urihttp://hdl.handle.net/10919/78280
dc.description.abstractThe unprecedented ability of plasmonic metal nano-structures to concentrate light into deep-subwavelength volumes has propelled their use in a vast array of nanophotonics technologies and research endeavors. They are used in sensing, super-resolution imaging, SPP lithography, SPP assisted absorption, SPP-based antennas, light manipulation, etc. To take full advantage of the attractive capabilities of CMOS compatible low-cost plasmonic structures based on Al and Cu, nanolaminate coatings are investigated to improve their long-term stability in corrosive physiological environments. The structures are fabricated using phase-shifting PDMS masks, e-beam deposition, RIE, Atomic Layer Deposition and Rapid Thermal Annealing. An alternate approach using Nanosphere Lithography (NSL) was also investigated. Films were examined using ellipsometry, atomic force microscopy and transmission measurements. Accelerated in-situ tests of Hafnium Oxide/Aluminum Oxide nanolaminate shells in a mildly pH environment with temperatures akin to physiological environments emulated using PBS show greatly enhanced endurance, with stable structures that last for more than one year.en_US
dc.format.mediumETDen_US
dc.publisherVirginia Techen_US
dc.rightsThis item is protected by copyright and/or related rights. Some uses of this item may be deemed fair and permitted by law even without permission from the rights holder(s), or the rights holder(s) may have licensed the work for use under certain conditions. For other uses you need to obtain permission from the rights holder(s).en_US
dc.subjectAluminum Oxide / Hafnium Oxide Nanolaminate Coatingsen_US
dc.subjectAtomic Layer Depositionen_US
dc.subjectPlasmonicsen_US
dc.subjectIn-situ Testingen_US
dc.subjectStability Improvementen_US
dc.titleNanolaminate coatings to improve long-term stability of plasmonic structures in physiological environmentsen_US
dc.typeThesisen_US
dc.contributor.departmentElectrical and Computer Engineeringen_US
dc.description.degreeMaster of Scienceen_US
thesis.degree.nameMaster of Scienceen_US
thesis.degree.levelmastersen_US
thesis.degree.grantorVirginia Polytechnic Institute and State Universityen_US
thesis.degree.disciplineElectrical Engineeringen_US
dc.contributor.committeechairZhou, Weien_US
dc.contributor.committeememberHsiao, Michael S.en_US
dc.contributor.committeememberStilwell, Daniel J.en_US


Files in this item

Thumbnail
Thumbnail

This item appears in the following Collection(s)

Show simple item record