Virginia TechDong, ShuxiangBai, FeimingYan, LiCao, HuLi, JiefangViehland, Dwight D.2014-02-032014-02-032004-05-01Dong, SX; Bai, FM; Yan, L; et al., "Vacuum response and gas leak detection in piezoelectrically driven sound-resonance cavity," Appl. Phys. Lett. 84, 4144 (2004); http://dx.doi.org/10.1063/1.17512170003-6951http://hdl.handle.net/10919/25282It has been found that a piezoelectrically driven sound-resonance cavity (PSRC) is quite sensitive to low-pressure changes: a change from ambient to vacuum (67 Pa) conditions results in a 89degrees phase shift and a -81% voltage decrease. Under vacuum conditions, the PSRC is highly sensitive (similar to7 ppm) to leakage of H-2 gas. (C) 2004 American Institute of Physics.application/pdfen-USIn CopyrightSensorsPhysicsVacuum response and gas leak detection in piezoelectrically driven sound-resonance cavityArticle - Refereedhttp://scitation.aip.org/content/aip/journal/apl/84/21/10.1063/1.1751217Applied Physics Lettershttps://doi.org/10.1063/1.1751217