Batra, Romesh C.Porfiri, M.Spinello, D.2017-03-042017-03-042008-02-011424-8220http://hdl.handle.net/10919/752461048 - 1069 (22) page(s)application/pdfenCreative Commons Attribution-NonCommercial 4.0 InternationalTechnologyChemistry, AnalyticalElectrochemistryInstruments & InstrumentationChemistrymicroelectromechanical systemsmicroplatevan der Waals forcepull-in instabilitymicrosensorENCAPSULATED POLYSILICON RESONATORSACTUATED NARROW MICROBEAMSREDUCED-ORDER MODELELECTROSTATIC MEMSCIRCULAR PLATESMODAL-ANALYSISTEMPERATUREPRESSUREBEHAVIORFIELDEffects of van der Waals force and thermal stresses on pull-in instability of clamped rectangular microplatesArticle - RefereedSensorshttps://doi.org/10.3390/s802104882