2016-08-242016-08-242005-02-15http://hdl.handle.net/10919/72503A hydrogen permselective membrane, a method of forming a permselective membrane and an apparatus comprising a permselective membrane, a porous substrate and an optional intermediate layer are described. Using chemical vapor deposition (CVD) at low reactant gas concentration, high permselectivities are achieved with minimal reduction in hydrogen permeance.application/pdfen-USPatenthttp://pimg-fpiw.uspto.gov/fdd/02/546/068/0.pdf10162058210/490210/500.26427/255.11427/255.1295/5595/5696/496/1096/11B01D67/0072B01D53/228B01D69/10B01D69/12B01D71/02B01D71/024B01D71/025B01D71/027B01D71/028B01D2325/022B01D2325/22C01B3/503C01B2203/041C01B2203/0465C01B2203/047C01B2203/0475C01B2203/048C01B2203/0485C01B2203/04956854602