Virginia Tech. Department of Materials Science and EngineeringEcole PoIytechnique Federale de Lausanne. Laboratoire de Ceramique, MX-DBursill, Les A.Reaney, Ian M.Vijay, Dilip P.Desu, Seshu B.2015-05-212015-05-211994-02-01Bursill, L. A., Reaney, I. M., Vijay, D. P., & Desu, S. B. (1994). Comparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodes. Journal of Applied Physics, 75(3), 1521-1525. doi: doi:http://dx.doi.org/10.1063/1.3563880021-8979http://hdl.handle.net/10919/52468High-resolution and bright- and dark-field transmission electron microscopy are used to characterize and compare the interface structures and microstructure of PZT/RuO2/SiO2/Si and PZT/Pt/Ti/SiO2/Si ferroelectric thin films, with a view to understanding the improved fatigue characteristics of PZT thin films with RuO2 electrodes. The RuO2/PZT interface consists of a curved pseudoperiodic minimal surface. The interface is chemically sharp with virtually no intermixing of RuO2 and PZT, as evidenced by the atomic resolution images as well as energy dispersive x-ray analysis. A nanocrystalline pyrochlore phase Pb2ZrTiO7-x, x not equal 1, was found on the top surface of the PZT layer. The PZT/Pt/Ti/SiO2/Si thin film was well crystallized and showed sharp interfaces throughout. Possible reasons for the improved fatigue characteristics of PZT/RuO2/SiO2/Si thin films are discussed.6 pagesapplication/pdfen-USIn CopyrightLead zirconate titanateFerroelectric thin filmsElectrodesMicrostructural propertiesThin film structureArticle - Refereedhttp://scitation.aip.org/content/aip/journal/jap/75/3/10.1063/1.356388https://doi.org/10.1063/1.356388