Song, Junyeob2021-12-022021-12-022020-06-09vt_gsexam:25999http://hdl.handle.net/10919/106808Plasmonics can achieve the tight optical confinement and localization in the subwavelength domain. Surface plasmon polaritons (SPPs) are closely related to coupling to emitters in excitation and emission, waveguiding, and active modulating on the nanoscale. Due to these phenomenon, plasmonic nanostructures can be used for applications, such as light emission, photodetection, optical sensing, and spectroscopy. Conventional plasmonic nanostructures can support plasmonic modes, and it is typically optimized for a single wavelength window with planar plasmonic structures. Recent studies have reported some in-plane composite nanostructures and core-shell geometries can induce multiple plasmonic responses. However, it is challenging to achieve the control of individual plasmonic response due to the interdependent spectral tunability with changes in their in-plane geometries. In this dissertation, the concept of out-of-plane engineered nanoantenna structures is introduced, numerically calculated, and experimentally demonstrated. The nanolaminated MIM plasmonic structures show multiresonant plasmonic responses in the same antenna and each wavelength band can be tunable individually with different thicknesses of dielectric layers. The nanolaminated plasmonic structures has been reported for a scalable Surface-enhanced Raman spectroscopy (SERS) substrate for single-molecule sensitive and label-free chemical analysis. Due to the strong optical field confinement, the nanolaminated SERS substrates achieve increased SERS enhancement factor (EF) up to 1.6 x 108 with proper partial etching of dielectric layers. Furthermore, the nanolaminated MIM plasmonic structures have been successfully integrated with micro-scale pillar arrays to control the surface wettability for ultrasensitive SERS measurements. The hierarchical micro/nano plasmonic surface has densely packed intrinsic SERS-active hot spots that give rise to SERS EFs exceeding 107. This platform can take full advantage of low surface energy to control and measure the analyte in water droplets. Leidenfrost evaporation-assisted SERS sensing on the hierarchical substrates provides the way for ultrafast and ultrasensitive biochemical detections without a need for additional surface modifications and chemical treatments.ETDIn CopyrightNanophotonicsplasmonicsnanofabricationSurface-enhanced Raman spectroscopyDissertation