Virginia TechPost, DanielPatorski, K.Ning, P.2014-04-042014-04-041987Daniel Post, Krzysztof Patorski, and Peitai Ning, "Compact grating interferometer for producing photoresist gratings with incoherent light," Appl. Opt. 26, 1100-1105 (1987). doi: 10.1364/AO.26.0011000003-6935http://hdl.handle.net/10919/46882An achromatic interferometer was developed to produce 1200-lines/mm crossed-line photoresist gratings with a mercury arc light source. It is a compact reflection system of outstanding stability. Alignment procedures are described. The most stringent requirement, coplanar alignment of two folding gratings, was accomplished with the aid of a Twyman-Green interferometer. The grating interferometer produced crossed-line photoresist gratings with first-order diffraction efficiency exceeding 20%.application/pdfen-USIn CopyrightArticle - Refereedhttp://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-26-6-1100https://doi.org/10.1364/AO.26.001100