Process for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process

2016-08-242016-08-241999-01-26http://hdl.handle.net/10919/72379Processes for providing a durable glass dielectric layer on an electrically conductive substrate are disclosed. Also disclosed are electrostatic chucks made by the process that include an electrically conductive substrate coated with a layer of glass having a composition that includes 60 wt. % to 80 wt. % SiO.sub.2.application/pdfen-USProcess for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the processPatenthttp://pimg-fpiw.uspto.gov/fdd/59/644/058/0.pdf8700605279/128361/234H01L21/6831H01L21/6833H02N13/00Y10T279/235864459