Browsing by Author "Agah, Masoud"

Now showing 1 - 20 of 63
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    3-D Bio-inspired Microenvironments for In Vitro Cell Migration
    Hosseini, Seyed Yahya (Virginia Tech, 2015-10-21)
    Cancer metastasis is the leading cause of death related to cancer diseases. Once the cancer cells depart the primary tumor site and enter the blood circulation, they spread through the body and will likely initiate a new tumor site. Therefore, understanding the cell migration and stopping the spread in the initial stage is the utmost of importance. In this dissertation, we have proposed a 3-D microenvironment that (partially) mimics the structures, complexity and circulation of human organs for cell migration studies. We have developed the tools to fabricate 3-D complex geometries in PDMS from our previously developed single-mask, single-etch technology in silicon. In this work, 3-D patterns are transferred from silicon structures to glass following anodic bonding and high temperature glass re-flow processes. Silicon is etched back thoroughly via wet etching and the glass is used as master device to create 3-D PDMS structures for use in dielectrophoresis cell sorting applications. Furthermore, this work has been modified to fabricate 3-D master devices in PDMS to create 3-D structures in collagen hydrogels to mimic native tissue structures. We have studied the interaction of endothelial cells with model geometries of blood vessels in collagen hydrogel at different concentrations to mimic the biomechanical properties of tissues varying from normal to tumor under the growth factor stimulation. Finally, we have designed and fabricated a silicon-based transmigration well with a 30um-thick membrane and 8um pores. This platform includes a deep microfluidic channel on the back-side sealed with a glass wafer. The migratory behavior of highly metastatic breast cancer cells, MDA-MB-231, is tested under different drug treatment conditions. This versatile platform will enable the application of more complex fluidic circulation profile, enhanced integration with other technologies, and running multiple assays simultaneously.
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    3D Micromachined Passive Components and Active Circuit Integration for Millimeter-wave Radar Applications
    Oliver, John Marcus (Virginia Tech, 2012-02-20)
    The development of millimeter-wave (30-300 GHz) sensors and communications systems has a long history of interest, spanning back almost six decades. In particular, mm-wave radars have applications as automotive radars, in remote atmospheric sensing applications, as landing radars for air and spacecraft, and for high precision imaging applications. Mm-wave radar systems have high angular accuracy and range resolution, and, while susceptible to atmospheric attenuation, are less susceptible to optically opaque conditions, such as smoke or dust. This dissertation document will present the initial steps towards a new approach to the creation of a mm-wave radar system at 94 GHz. Specifically, this dissertation presents the design, fabrication and testing of various components of a highly integrated mm-wave a 94 Ghz monopulse radar transmitter/receiver. Several architectural approaches are considered, including passive and active implementations of RF monopulse comparator networks. These architectures are enabled by a high-performance three-dimensional rectangular coaxial microwave transmission line technology known as PolyStrataTM as well as silicon-based IC technologies. A number of specific components are examined in detail, including: a 2x2 PolyStrata antenna array, a passive monopulse comparator network, a 94 GHz SiGe two-port active comparator MMIC, a 24 GHz RF-CMOS 4-port active monopulse comparator IC, and a series of V- and W-band corporate combining structures for use in transmitter power combining applications. The 94 GHz cavity-backed antennas based on a rectangular coaxial feeding network have been designed, fabricated, and tested. 13 dB gain for a 2 x 2 array, as well as antenna patterns are reported. In an effort to facilitate high-accuracy measurement of the antenna array, an E-probe transition to waveguide and PolyStrata diode detectors were also designed and fabricated. AW-band rectangular coaxial passive monopulse comparator with integrated antenna array and diode detectors have also been presented. Measured monopulse nulls of 31.4 dB in the ΔAZ plane have been demonstrated. 94-GHz SiGe active monopulse comparator IC and 24 GHz RF-CMOS active monopulse comparator RFIC designs are presented, including detailed simulations of monopulse nulls and performance over frequency. Simulations of the W-band SiGe active monopulse comparator IC indicate potential for wideband operation, with 30 dB monopulse nulls from 75-105 GHz. For the 24-GHz active monopulse comparator IC, simulated monopulse nulls of 71 dB and 68 dB were reported for the azimuthal and elevational sweeps. Measurements of these ICs were unsuccessful due to layout errors and incomplete accounting for parasitics. Simulated results from a series of rectangular coaxial power corporate power combining structures have been presented, and their relative merits discussed. These designs include 2-1 and 4-1 reactive, Wilkinson, and Gysel combiners at V- and W-band. Measured back-to-back results from Gysel combiners at 60 GHz included insertion loss of 0.13 dB per division for a 2-1 combination, and an insertion loss of 0.3 dB and 0.14 dB for "planar" and "direct" 4-1 combinations, respectively. At 94 GHz, a measured insertion loss of 0.1 dB per division has been presented for a 2-1 Gysel combination, using a back-to-back structure. Preliminary designs for a solid-state power amplifier (SSPA) structure have also been presented. Finally, two conceptual monopulse transceivers will be presented, as a vehicle for integrating the various components demonstrated in this dissertation.
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    The AFM Study of Ovarian Cell Structural Mechanics in the Progression of Cancer
    Ketene, Alperen Nurullah (Virginia Tech, 2011-05-06)
    According to the American Cancer Society, Cancer is the second most common cause of death in the United States, only exceeded by heart disease. Over the past decade, deciphering the complex structure of individual cells and understanding the symptoms of cancer disease has been a highly emphasized research area. The exact cause of Cancer and the genetic heterogeneity that determines the severity of the disease and its response to treatment has been a great challenge. Researchers from the engineering discipline have increasingly made use of recent technological innovations, namely the Atomic Force Microscope (AFM), to better understand cell physics and provide a means for cell biomechanical profiling. The presented work's research objective is to establish a fundamental framework for the development of novel biosensors for cell separation and disease diagnosis. By using AFM nanoindentation, several studies were conducted to identify key distinctions in the trends of cell viscoelasticity between healthy, nontumorigenic cells and their malignant, highly tumorigenic counterparts. The possibility of identifying useful 'biomarkers' was also investigated. Due to the lack of an available human ovarian cell line, experiments were done on a recently developed mouse ovarian surface epithelial (MOSE) cell line, which resembles to human cell characteristics and represents early, intermediate, and late stages of the ovarian cancer. Material properties were extracted via Hertz model contact theory. The experimental results illustrate that the elasticity of late stage MOSE cells were 50% less than that of the early stage. Cell viscosity also decreased by 65% from early to late stage, indicating that the increase in cell deformability directly correlates with increasing levels of malignancy. Various cancer treatment and component-specific drugs were used to identify the causes for the changes in cell biomechanical behavior, depicting that the decrease in the concentration levels of cell structural components, predominantly the actin filament framework, is directly associated with the changes in cell biomechanical property. The investigation of MOSE cells being subject to multiple mechanical loads illustrated that healthy cells react to shear forces by stiffening up to 25% of their original state. On the other hand, cancerous cells are void of such response and at times show signs of decreasing rigidity. Finally, deformation studies on MOSE cancer stem cells have shown that these cells carry a unique elasticity profile among other cell stage phenotypes that could allow for their detection. The results herein carry great potential into contributing to cell separation methods and analysis, furthering the understanding of cell mechanism dynamics. While prior literature emphasizes on the elastic modulus of cells, the study of cell viscosity and other key material properties holds a critical place in the realistic modeling of these complex microstructures. A comprehensive study of individual cells holds a great amount of promise in the development of effective clinical research in the fight against cancer.
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    The Analysis and Design of Phase-tunable Low-Power Low-Phase-Noise I/Q Signal Sources for Analog Phase Calibrated Transceivers
    Chamas, Ibrahim (Virginia Tech, 2008-06)
    Due to the demand for low-cost, small-form factor and large-scale integration of system-on-chip wireless transceivers, the image-reject, zero-IF and low-IF receiver architectures have become the main topologies used in mainstream wireless communication systems. Consequently, signal sources with quadrature phase outputs [quadrature oscillators (QOs)] are therefore essential, and their phase noise, driving capability, tuning range, oscillation frequency, and power consumption have a major impact on the overall receiver performance. Additionally, it is required that the QO synthesize precise I/Q waveforms across the signal bandwidth over process, voltage, and temperature variations for adequate image-rejection and signal modulation/demodulation. While the use of symmetrical layout and large inter-digitated devices minimize both systematic and random mismatches, this solution alone may not succeed in achieving the stringent performance requirements dictated by modern wireless standards particularly as the technology scales into the sub-100nm regime, necessitating both phase and gain calibration of the mismatched I/Q channels post-fabrication. Given the necessity for precise RF quadrature signal synthesis, the goal of this work is to investigate low-power low-phase-noise quadrature oscillator (QVCO) topologies with an integrated phase calibration feature. The first part of this work focuses on the analysis and modeling of cross-coupled LC QVCOs. The analysis focuses on understanding the oscillator basic performance characteristics, design trade-offs, phase-noise performance, effect of including phase shift in the coupling paths, and on examining the quadrature accuracy in presence of process variations. New design parameters and circuit insight are developed and a generalized first order linear model and a one-port model are proposed. Particularly, we introduce the concept of an effective core and coupling transconductances to explain various oscillator properties. Additionally, a new incremental circuit element — the quadrature resistance — is introduced to evaluate the effect of coupling on the open-loop quality factor and hence on the oscillator phase noise performance. Mechanisms affecting the mode selectivity are identified and modeled. A qualitative and quantitative study of the effect of mismatch on the phase imbalance and amplitude error is presented. Particularly, closed-form intuitive expressions of the phase imbalance and amplitude error are derived and verified via circuit simulation. Based on our understanding of the various mechanisms affecting the quadrature accuracy, the second part of this work introduces a very efficient quadrature phase calibration technique based on the disconnected-source parallel-coupled LC QVCO topology. The phase-tunable LC QVCO (PT-QVCO) achieves an ultra-wide I/Q phase tuning range without affecting the relative amplitude error or consuming additional power or chip area. Additionally, in restoring the phase balance, it is observed that the proposed method restores the phase noise performance to its optimal value which presents a potential advantage over classical calibration techniques. Time domain measurements performed on a 5 GHz prototype show that I/Q signals with phase error up to ~±30°, beyond which the VCO cores are unlocked, can be driven to perfect quadrature phase. The PT-QVCO can be tuned from 3.87-4.45 GHz at the negative mode and 4.4-5.4 GHz at the positive mode, a total of ~1.5 GHz. The fabricated circuit including pad structures occupies an area of 1.1x0.7 mm² and drains 18mW (excluding buffer circuits) from a 1.8 V supply voltage. The third part of this work introduces a new low-power, low-phase-noise super harmonic injection-coupled LC QVCO (IC-QVCO) topology. Analysis of the waveform accuracy reveals an inverse dependence of the quadrature error on the tank quality factor thus allowing circuit optimization for both low phase noise and precise quadrature synthesis. Additionally, a tunable tail filter (TTF) is incorporated to calibrate the residual quadrature imbalance in presence of a 3-σ variation in the device parameters. An X-band IC-QVCO prototype with a TTF implemented in a 0.18μm RF CMOS process, achieves a measured phase noise figure-of-merit ranging from 177.3 to 182.6 dBc/Hz along the 9.0 to 9.6 GHz frequency tuning range while dissipating only 9mW from the 1.8V supply. The TTF reduces both the 1/f² and 1/f³ phase noise and calibrates the residual phase error within ±11° post-fabrication without affecting the relative amplitude error or the phase noise performance. The circuit performance compares favorably with recently published work. In the fourth part of this work, we explore the implementation of LC QVCOs as potential I/Q sources at millimeter-wave (MMW) frequencies. Among the several design challenges that emerge as the oscillator frequency is scaled into the MMW band, precise quadrature synthesis and adequate frequency tuning range are among the hardest to achieve. After describing the limitation of using an MOS varactor and a digitally controlled switch capacitor array for frequency tuning, we propose an alternative frequency tuning technique based on the fundamental operation of LC QVCOs. The off-resonance operation, which is defined by the coupling network, suggests varying the coupling current to achieve frequency tuning. In essence, by modifying the bias current of the coupling transistors (GMc-tuning), a wide and linear frequency tuning range can be achieved. Extensive simulation results of a 60 GHz prototype, implemented in a 90 nm commercial RF CMOS process, demonstrates a 5 GHz of frequency tuning range (57.5 GHz → 62.5 GHz), a tuning sensitivity of 1GHz/mA, and a 4dB improvement in the phase noise compared to a varactor solution. Finally, the Appendix includes recent research work on the analysis and design of gm-boosted common-gate low-noise amplifiers (CG-LNAs). While this topic seems to diverge from the main theme of the dissertation, we believe that the comprehensive analysis and the originality of the circuit design introduced in this work are worth acknowledging.
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    Analytical and Spectro-Spatial Analyses of Nonlinear Metamaterials for Vibration Control, Energy Harvesting, and Acoustic Non-Reciprocity
    Bukhari, Mohammad Abdulbaqi (Virginia Tech, 2021-06-23)
    This dissertation investigates the nonlinear wave propagation phenomena in nonlinear metamaterials with nonlinear chains and nonlinear resonators using analytical and spectro-spatial analyses. In the first part of the thesis, the nonlinear metamaterials are modeled as a chain of masses with multiple local resonators attached to each cell. The nonlinearity stems from the chain's stiffness in one case and the local resonator's stiffness in another. Analytical approximates solutions are obtained for each case using perturbation techniques. These results are validated through numerical simulations and the results show good agreement. To further demonstrate the nonlinear wave propagation characteristics, spectro-spatial analyses are conducted on the numerical integration data sets. The wave profiles, short-term Fourier transform spectrograms, and contour plots of 2D Fourier transform show the presence of solitary waves for both sources of nonlinearity. In addition, spectro-spatial features demonstrate the presence of significant frequency shifts at different wavelength limits. indent The second part of the thesis studies a nonlinear electromechanical metamaterial and examines how the electromechanical coupling in the local resonator affects the wave propagation. Numerical examples indicate that the system can be used for simultaneous energy harvesting and vibration attenuation without any degradation in the size of bandgaps. Spectro-spatial analyses conducted on the electromechanical metamaterial also reveal the presence of solitons and frequency shifts. The presence of solitary wave in the electromechanical metamaterial suggests a significant improvement in energy harvesting and sensing techniques. The obtained significant frequency shift is employed to design an electromechanical diode, allowing voltage to be sensed and harvested only in one direction. Design guidelines and the role of different key parameters are presented to help designers to select the type of nonlinearity and the system parameters to improve the performance of acoustic diodes. indent The last part of this thesis studies the passive self-tuning of a metastructure via a beam-sliding mass concept. The governing equations of motions of the holding structure, resonator, and sliding mass are presented and discretized into a system of ODEs using Galerkin's projection. Given that the spatial parameters of the system continuously change over time (i.e., mode shapes and frequencies), instantaneous exact mode shapes and frequencies are determined for all possible slider positions. The numerical integration is conducted by continuously updating the spatial state of the system. The obtained exact mode shapes demonstrate that the resonance frequency of the resonator stretches over a wide frequency band. This observation indicates that the resonator can attenuates vibrations at a wide frequency range. Experiments are also conducted to demonstrate the passive self-tunability of the metastructure and the findings colloborate the analytical results.
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    Applications of Non-linearities in RF MEMS Switches and Resonators
    Vummidi Murali, Krishna Prasad (Virginia Tech, 2015-04-06)
    The 21st century is emerging into an era of wireless ubiquity. To support this trend, the RF (Radio Frequency) front end must be capable of processing a range of wireless signals (cellular phone, data connectivity, broadcast TV, GPS positioning, etc.) spanning a total bandwidth of nearly 6 GHz. This warrants the need for multi-band/multi-mode radio architectures. For such architectures to satisfy the constraints on size, battery life, functionality and cost, the radio front-end must be made reconfigurable. RF-MEMS (RF Micro-Electro-Mechanical Systems) are seen as an enabling technology for such reconfigurable radios. RF-MEMS mainly include micromechanical switches (used in phase shifters, switched capacitor banks, impedance tuners etc.) and micromechanical resonators (used in tunable filters, oscillators, reference clocks etc.). MEMS technology also has the potential to be directly integrated into CMOS (Complementary metal-oxide semiconductor) ICs (Integrated Circuits) leading to further potential reductions of cost and size. However, RF-MEMS face challenges that must be addressed before they can gain widespread commercial acceptance. Relatively low switching speed, power handling, and high-voltage drive are some of the key issues in MEMS switches. Phase noise influenced by non-linearities, need for temperature compensation (especially Si based resonators), large start-up times, and aging are the key issues in Si MEMS Resonators. In this work potential solutions are proposed to address some of these key issues, specifically the reduction of high voltage drives in switches and the reduction of phase noise in MEMS resonators for timing applications. MEMS devices that are electrostatically actuated exhibit significant non-linearities. The origins of the non-linearities are both electrical (electrostatic actuation) and mechanical (dimensions and material properties). The influence of spring non-linearities (cubic and quadratic) on the performance of switches and resonators are studied. Gold electroplated fixed-fixed beams were fabricated to test the phenomenon of dynamic (or resonant) pull-in in shunt switches. The dynamic pull-in phenomenon was also tested on commercially fabricated lateral switches. It is shown that the resonant pull-in technique reduces the overall voltage required to actuate the switch. There is an additional reduction of total actuation voltage possible via applying an AC actuation signal at the correct non-linear resonant frequency. The demonstrated best case savings from operating at the non-linear resonanceis 50 % (for the lateral switch) and 60 % (for the vertical switch) as compared to 25 % and 40 % respectively using a fixed frequency approach. However, the timing response for resonant pull-in has been experimentally shown to be slower than the static actuation. To reduce the switching time, a shifted-frequency method is proposed where the excitation frequency is shifted up or down by a discrete amount 'Ω after a brief hold time. It was theoretically shown that the shifted-frequency method enables a minimum realizable switching time comparable to the static switching time for a given set of actuation frequencies. The influence of VDC on the effective non-linearities of a fixed-fixed beam is also studied. Based on the dimensions of the resonator and the type of resonance there is a certain VDC,Lin where the response is near linear (S ' 0). In the near-linear domain, the dynamic pull-in is the only upper bound to the amplitude of vibrations, and hence the amplitude of output current, thereby maximizing the power handling capacity of the resonator. Apart from maximizing the output current, it is essential to reduce the amplitude and phase variations of the displacement response which are due to noise mixing into frequency of interest, and are eventually manifested as output phase noise due to capacitive current nonlinearity. Two major aliasing schemes were analyzed and it was shown that the capacitive force non-linearity is the major source of mixing that causes the up-conversion of 1/f frequency into signal sidebands. The resonator's periodic response (displacement) is defined by a set of two first- order nonlinear ordinary differential equations that describe the modulation of amplitude and phase of the response. Frequency response curves of amplitude and frequency are determined from these modulation equations. The zero slope point on the amplitude resonance curve is the peak of the resonance curve where the phase ('dc) of the response is ±π/2. For a strongly non-linear system, the resonance curves are skewed based on the amount of total non-linearity S. For systems that are strongly non-linear, the best region to operate the resonator is the fixed point that correspond to infinite slope ('dc = ±2π/3) in the frequency response of the system. The best case phase noise response was analytically developed for such a fixed point. Theoretically at this fixed point, phase noise will have contributions only from 1/f noise and not from 1/f2 and 1/f3. The resonators phase can be set by controlling the rest of the phase in the loop such that the total phase around the loop is zero or 2π. In addition, this work has also developed an analytical model for a lateral MEMS switch fabricated in a commercial foundry that has the potential to be processed as MEMS on CMOS. This model accounts for trapezoidal cross sections of the electrodes and springs and also models electrostatic fringing as a function of the moving gap. The analytical model matches closely with the Finite Element (FEA) model.
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    Bioimpedance spectroscopy of breast cancer cells: A microsystems approach
    Srinivasaraghavan, Vaishnavi (Virginia Tech, 2015-11-04)
    Bioimpedance presents a versatile, label-free means of monitoring biological cells and their responses to physical, chemical and biological stimuli. Breast cancer is the second most common type of cancer among women in the United States. Although significant progress has been made in diagnosis and treatment of this disease, there is a need for robust, easy-to-use technologies that can be used for the identification and discrimination of critical subtypes of breast cancer in biopsies obtained from patients. This dissertation makes contributions in three major areas towards addressing the goal. First, we developed miniaturized bioimpedance sensors using MEMS and microfluidics technology that have the requisite traits for clinical use including reliability, ease-of-use, low-cost and disposability. Here, we designed and fabricated two types of bioimpedance sensors. One was based on electric cell-substrate impedance sensing (ECIS) to monitor cell adhesion based events and the other was a microfluidic device with integrated microelectrodes to examine the biophysical properties of single cells. Second, we examined a panel of triple negative breast cancer (TNBC) cell lines and a hormone therapy resistant model of breast cancer in order to improve our understanding of the bioimpedance spectra of breast cancer subtypes. Third, we explored strategies to improve the sensitivity of the microelectrodes to bioimpedance measurements from breast cancer cells. We investigated nano-scale coatings on the surface of the electrode and geometrical variations in a branched electrode design to accomplish this. This work demonstrates the promise of bioimpedance technologies in monitoring diseased cells and their responses to pharmaceutical agents, and motivates further research in customization of this technique for use in personalized medicine.
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    Biomarkers of Lipid Oxidation in the Oral Cavity
    Vereb, Heather A. (Virginia Tech, 2011-10-14)
    Measuring lipid oxidation is useful as a means of monitoring oxidative stress, such as that induced by clinical conditions or environmental exposure. Characteristic volatile compounds, often with low threshold odors, are secondary products of lipid oxidation reactions. Metallic flavor in food and beverages has been linked with oxidation of lipids in the oral cavity. Breath, an emerging medium for analysis of internal condition, is one means of measuring the metal-induced lipid oxidation responsible for this flavor. This project analyzes the breath of human subjects, as well as lipid oxidation of in vitro samples to identify compounds responsible for producing metallic flavor, which result from the oxidation of lipids in the oral cavity. Because these analytes are found at extremely low (picomolar to nanomolar) concentrations, preconcentration of samples prior to gas chromatography-mass spectrometry analysis is crucial. This study utilizes both solid phase microextraction (SPME) and micromachined silicon micropreconcentrators to concentrate compounds in breath to optimize analysis.
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    Buckling at the Fluid - Soft Solid Interface; A Means for Advanced Functionality within Soft Materials
    Tavakol, Behrouz (Virginia Tech, 2015-09-02)
    Soft materials and compliant structures often undergo significant deformation without failure, a unique feature making them distinct from classical rigid materials. These substantial deformations provide a means for faster or more energy efficient deformations, which can be achieved by taking advantage of elastic instabilities. We intend to utilize structural instabilities to generate advanced functionality within soft materials. In particular, we use the buckling of thin, flexible plates to control or enhance the flow of fluid in a micro channel. The buckling deformation is created or altered via two different stimuli, first a mechanical strain and then an electrical signal. We investigate the behavior of each system under different conditions experimentally, numerically, or theoretically. We also show that the coupled interaction between fluid and the soft film plays a critical role in the shape of deformation and consequently in the functionality of the mechanism. We first embed a buckled thin film in a fluid channel within a soft device. By applying a mechanical strain to the device, we show both experimentally and numerically that the height of the buckled film changes accordingly as does the flow rate. We then offer an analytical solution by extending the classical lubrication theory to higher-order terms as a means to more accurately describe the flow in a channel with a buckled thin film, and in general, the flow in channels with any constrictions provided the Reynolds number is low. Next, we use an electrical signal to make a confined dielectric film undergo out-of-plane buckling deformation. The thin film is sandwiched between two flexible electrodes and the mechanism is implemented in a microfluidic device to pump the fluid into a micro channel. We show that the critical buckling voltage at which the thin film buckles out of the plane is mainly a function of voltage while the shape of deformation and so the functionality of this mechanism depend considerably on the applied boundary conditions. Finally, we enhance the fluid-soft structure response of the actuating mechanism by substituting flexible electrodes with fluid electrodes, resulting in a significant increase in the actuation frequency as well as a reduction in the critical buckling voltage.
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    Characterization of Dopant Diffusion in Bulk and lower dimensional Silicon Structures
    Ndoye, Coumba (Virginia Tech, 2010-12-02)
    The semiconductor industry scaling has mainly been driven by Moore's law, which states that the number of transistors on a single chip should double every year and a half to two years. Beyond 2011, when the channel length of the Metal Oxide Field effect transistor (MOSFET) approaches 16 nm, the scaling of the planar MOSFET is predicted to reach its limit. Consequently, a departure from the current planar MOSFET on bulk silicon substrate is required to push the scaling limit further while maintaining electrostatic control of the gate over the channel. Alternative device structures that allow better control of the gate over the channel such as reducing short channel effects, and minimizing second order effects are currently being investigated. Such novel device architectures such as Fully-Depleted (FD) planar Silicon On Insulator (SOI) MOSFETS, Triple gate SOI MOSFET and Gate-All-Around Nanowire (NW) MOSFET utilize Silicon on Insulator (SOI) substrates to benefit from the bulk isolation and reduce second order effects due to parasitic effects from the bulk. The doping of the source and drain regions and the redistribution of the dopants in the channel greatly impact the electrical characteristics of the fabricated device. Thus, in nano-scale and reduced dimension transistors, a tight control of doping levels and formation of pn junctions is required. Therefore, deeper understanding of the lateral component of the diffusion mechanisms and interface effects in these lower dimensional structures compared to the bulk is necessary. This work focuses on studying the dopant diffusion mechanisms in Silicon nanomembranes (2D), nanoribbons (â 1.Xâ D), and nanowires (1D). This study also attempts to benchmark the 1D and 2D diffusion against the well-known bulk (3D) diffusion mechanisms.
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    Chemical Micro Preconcentrators Development for Micro Gas Chromatography Systems
    Alfeeli, Bassam (Virginia Tech, 2010-10-06)
    Microelectromechanical systems (MEMS) technology allows the realization of mechanical parts, sensors, actuators and electronics on silicon substrate. An attractive utilization of MEMS is to develop micro instruments for chemical analysis. An example is gas chromatography (GC) which is widely used in food, environmental, pharmaceutical, petroleum/refining, forensic/security, and flavors and fragrances industries. A MEMS-based micro GC (µGC) provides capabilities for quantitative analysis of complex chemical mixtures in the field with very short analysis time and small amounts of consumables. The aim of this research effort is to enhance the sensitivity and selectivity of µGC instruments by implementing chemical amplification method known as preconcentration. A micro preconcentrator (µPC) extracts the target analytes from the sample matrix, concentrates them, and injects them into the separation column for analysis. This work resulted in the development of silicon-glass bonded chips consisting of 7 mm x 7 mm x 0.38 mm multiport cavity with thousands of embedded 3D microstructures (to achieve high surface-to-volume ratio) coated with polymeric thin film adsorbents. Deep reactive ion etching (DRIE) was the enabling technology for the realization of µPCs. Several coating methods, such as inkjet printing of polymers and polymer precipitation from solution have been utilized to coat complex geometrical structures. One major outcome was the development of cobweb adsorbent structure. Moreover, the porous polymeric adsorbent Tenax TA in the film form was characterized, for the first time, for μPC application and shown to have similar properties to that of the granular form. Several μPC designs were experimentally evaluated for their performance in concentrating volatile organic compounds, including cancer biomarkers, Propofol (anesthetic agent), environmental pollutants, and chemical warfare simulants. The possibility of utilizing the μPCs in practical applications such breath analysis was also demonstrated.
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    Chip-Scale Gas Chromatography
    Akbar, Muhammad (Virginia Tech, 2015-09-04)
    Instrument miniaturization is led by the desire to perform rapid diagnosis in remote areas with high throughput and low cost. In addition, miniaturized instruments hold the promise of consuming small sample volumes and are thus less prone to cross-contamination. Gas chromatography (GC) is the leading analytical instrument for the analysis of volatile organic compounds (VOCs). Due to its wide-ranging applications, it has received great attention both from industrial sectors and scientific communities. Recently, numerous research efforts have benefited from the advancements in micro-electromechanical system (MEMS) and nanotechnology based solutions to miniaturize the key components of GC instrument (pre-concentrator/injector, separation column, valves, pumps, and the detector). The purpose of this dissertation is to address the critical need of developing a micro GC system for various field- applications. The uniqueness of this work is to emphasize on the importance of integrating the basic components of μGC (including sampling/injection, separation and detection) on a single platform. This integration leads to overall improved performance as well as reducing the manufacturing cost of this technology. In this regard, the implementation of micro helium discharge photoionization detector (μDPID) in silicon-glass architecture served as a major accomplishment enabling its monolithic integration with the micro separation column (μSC). For the first time, the operation of a monolithic integrated module under temperature and flow programming conditions has been demonstrated to achieve rapid chromatographic analysis of a complex sample. Furthermore, an innovative sample injection mechanism has been incorporated in the integrated module to present the idea of a chip-scale μGC system. The possibility of using μGC technology in practical applications such as breath analysis and water monitoring is also demonstrated. Moreover, a nanotechnology based scheme for enhancing the adsorption capacity of the microfabricated pre-concentrator is also described.
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    Colloidal Cerium Oxide Nanoparticle: Synthesis and Characterization Techniques
    Clinton, Jamie C. (Virginia Tech, 2008-01-25)
    Fluorescence spectra and UV-Vis absorption spectra are collected on cerium oxide nanocrystalline particles. While CeO2 is the stable form of bulk cerium oxide, ceria nanoparticles exhibit a nonstoichiometric composition, CeO2-γ, due to the presence of oxygen vacancies and the formation of Ce2O3 at the grain boundaries. The Ce(III) ions, which are more reactive and therefore more desirable for various applications, are created by oxygen vacancies, which act as defects in the CeO2-γ crystal lattice. These defects form trap states in the band gap of CeO2, which can be seen in the absorption spectra. Ce(III) is required for fluorescence of the ceria nanoparticles while Ce(IV) is involved in only nonradiative transitions. The optical spectroscopy results show that the ceria samples have different ratios of Ce(III) ions to Ce(IV) ions, which is verified by x-ray photoemission spectroscopy (XPS).
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    Controlling Microbial Colonization and Biofilm Formation Using Topographical Cues
    Kargar, Mehdi (Virginia Tech, 2015-01-13)
    This dissertation introduces assembly of spherical particles as a novel topography-based anti-biofouling coating. It also provides new insights on the effects of surface topography, especially local curvature, on cell–surface and cell–cell interactions during the evolution of biofilms. I investigated the adhesion, colonization, and biofilm formation of the opportunistic human pathogen Pseudomonas aeruginosa on a solid coated in close-packed spheres of polystyrene, using flat polystyrene sheets as a control. The results show that, whereas flat sheets are covered in large clusters after one day, a close-packed layer of 630–1550 nm monodisperse spheres prevents cluster formation. Moreover, the film of spheres reduces the density of P. aeruginosa adhered to the solid by 80%. Our data show that when P. aeruginosa adheres to the spheres, the distribution is not random. For 630 nm and larger particles, P. aeruginosa tends to position its body in the confined spaces between particles. After two days, 3D biofilm structures cover much of the flat polystyrene, whereas 3D biofilms rarely occur on a solid with a colloidal crystal coating of 1550 nm spheres. On 450 nm colloidal crystals, the bacterial growth was intermediate between the flat and 1550 nm spheres. The initial preference for P. aeruginosa to adhere to confined spaces is maintained on the second day, even when the cells form clusters: the cells remain in the confined spaces to form non-touching clusters. When the cells do touch, the contact is usually the pole, not the sides of the bacteria. The observations are rationalized based on the potential gains and costs associated with cell-sphere and cell-cell contacts. I concluded that the anti-biofilm property of the colloidal crystals is correlated with the ability to arrange the individual cells. I showed that a colloidal crystal coating delays P. aeruginosa cluster formation on a medical-grade stainless-steel needle. This suggests that a colloidal crystal approach to biofilm inhibition might be applicable to other materials and geometries. The results presented in appendix 1 suggest that colloidal crystals can also delay adhesion of Methicillin resistant staphylococcus aureus (MRSA) while it supports selective adhesion of this bacterium to the confined spaces.
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    Density Modulated Semi-Packed Micro Gas Chromatography Columns
    Chan, Ryan (Virginia Tech, 2018-05-03)
    With the continued evolution of MEMS-based gas chromatography, the drive to develop new standalone systems with lower power consumptions and higher portability has increased. However, with improvements come tradeoffs, and trying to reduce the pressure drop requirements of previously reported semi-packed columns causes a significant sacrifice in separation efficiency. This thesis covers the techniques for evaluating the separation column in a gas chromatography system as well as the important parameters that have the most effect on a column’s efficiency. Ionic liquids are introduced as a stable and versatile stationary phase for micro separation columns. It then describes a MEMS-based separation column design utilizing density modulation of embedded micro-pillars which attempts to optimize the balance between separation efficiency and pressure drop.
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    Design and Characterization of Liquid Metal Flip Chip Interconnections for Heterogeneous Microwave Assemblies
    Ralston, Parrish Elaine (Virginia Tech, 2013-05-08)
    Flip chip interconnections have superior performance for microwave applications compared to wire bond interconnections because of their reduced parasitics, more compact architecture, and flexibility in laying out flip chip bond pads. Reduction in interconnect parasitics enables these interconnects to support broadband signals, therefore increasing the bandwidth capabilities of flip chip-assembled systems. Traditional flip chip designs provide mechanical and electrical connections from a top chip to a carrier substrate with rigid solder joints. For heterogeneous assemblies, flip chip connections suffer from thermo-mechanical failures caused by coefficient of thermal expansion mismatches. As an alternative, flexible flip chip interconnections incorporating a metal, which is liquid at room temperature, mitigates the possibility of such thermo-mechanical failures. Additionally, liquid metal, flip chip interconnections allow for room temperature assembly, simplifying assembly and rework processes. This dissertation focuses on the design and characterization of liquid metal interconnections, specifically using Galinstan, an alloy of gallium indium and tin, for the heterogeneous assembly of active monolithic microwave integrated circuits (MMICs) onto a CTE mismatched substrate. Carrier substrates designed for liquid metal transitions were fabricated on high resistivity Si and on three dimensional copper structures. The three dimensional copper structures were fabricated in the PolyStrata™ process. Individual MMIC chips were post-processed to mate with carrier substrates in a liquid metal, flip chip configuration. S-parameter measurements of prototype MMIC assemblies with liquid metal, flip chip interconnections showed an average transition loss of 0.7dB over the MMIC's frequency of operation (4.9 - 8.5 GHz). Passive assemblies were also fabricated to characterize the power and temperature performance of liquid metal transitions. Liquid metal interconnections show excellent power handling, maintaining consistent RF performance while transmitting 100W of continuous wave power for an hour. Liquid metal interconnections were also tested following 200 temperature cycles over the -140°C – 125°C range. A comparison of S parameter measurements taken before and after temperature cycling, over a frequency range of 10MHz - 40GHz showed no significant changes in performance. These passive assemblies were also used to develop a lumped element model of the interconnection which is useful for the verification the interconnection\'s performance and for comparison of liquid metal interconnection parasitic to wire bond and flip chip interconnect parasitics. The experimental results presented in this dissertation confirm that liquid metal interconnect are viable for wider use in military and commercial applications. In the future, additional environmental testing and further refinement of the processing flow, such as improved contact metallurgy, are needed to make this interconnect approach more viable for large volume manufacturing.
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    Design and Verification of a High Voltage, Capacitance Voltage Measurement System for Power MOSFETs
    Ralston, Parrish Elaine (Virginia Tech, 2008-12-12)
    There is a need for a high voltage, capacitance voltage (HV, CV) measurement system for the measurement and characterization of silicon carbide (SiC) power MOSFETs. The following study discusses the circuit layout and automation software for a measurement system that can perform CV measurements for all three MOSFET capacitances, CGS, CDS, and CGD. This measurement system can perform low voltage (0–40V) and high voltage (40–5kV) measurements. Accuracy of the measurement system can be safely and effectively adjusted based on the magnitude of the MOSFET capacitance. An IRF1010N power MOSFET, a CoolMos, and a prototype SiC power MOSFET are all measured and their results are included in this study. All of the results for the IRF1010N and the CoolMos can be verified with established characteristics of power MOSFET capacitance. Results for the SiC power MOSFET prove that more testing and further development of SiC MOSFET fabrication is needed.
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    Designing and Fabricating MEMS Cantilever Switches
    El-Helw, Sarah Reda (Virginia Tech, 2016-09-23)
    In this thesis, MEMS switches actuated using electrostatic actuation is explored. MEMS switches that are lateral switches and clamped-clamped switches are designed, fabricated, and tested in this thesis. This thesis extensively explains the process by which the MEMS Switches were designed and fabricated. In addition, it explains the changes in the switches when issues called for a modification to devices. Contact resistances were extensively studied, in this thesis. There has been a trade-off between the reliability of switches and their contact resistances. Many actions were taken to mitigate this trade-off and to allow both reliable devices with low contact resistances. The efforts to do so ranged from thermal oxidation to reduce the scalloping on the sidewalls, to modifying the dry etching recipe, to modifying the sputtering recipe, to electroplating, and many more. However, reliability of the MEMS Lateral switches was accomplished independent to the contact resistances. In addition, low contact resistances were accomplished independent to reliability. A novel approach to designing clamped-clamped MEMS switches is also showcased in this thesis. These devices experienced unique challenges compared to those faced with lateral switches. Both lateral and clamped-clamped switches are discussed in-depth in this thesis.
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    Development of Bi-Directional Module using Wafer-Bonded Chips
    Kim, Woochan (Virginia Tech, 2015-01-06)
    Double-sided module exhibits electrical and thermal characteristics that are superior to wire-bonded counterpart. Such structure, however, induces more than twice the thermo-mechanical stress in a single-layer structure. Compressive posts have been developed and integrated into the double-sided module to reduce the stress to a level acceptable by silicon dice. For a 14 mm x 21 mm module carrying 6.6 mm x 6.6 mm die, finite-element simulation suggested an optimal design having four posts located 1 mm from the die; the z-direction stress at the chip was reduced from 17 MPa to 0.6 MPa.
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    Development of Bio-Impedance microprobes for Integration with a Smart Biopsy tool
    Jayabalan, Vivek (Virginia Tech, 2014-11-14)
    Biopsy is a standard practice in the diagnosis and treatment of many cancers. Despite its integral role in cancer diagnosis, in some instances, the biopsy tool facilitates metastasis by transferring cancerous cells attached to its exterior into the healthy tissue or the blood circulation during its retraction from the tumor. These few cancer cells can then serve as seeds for the malignant tumor to grow in the healthy tissue. Cauterization using extreme heat or cold can destroy cells in the region and minimize the chance of seeding but this can be an inexact process that increases damage to otherwise healthy tissue and prolongs healing time following a biopsy procedure. In our laboratory, we have developed the concept of a new smart biopsy tool that can reduce the chance of cancer cell dissemination during a biopsy. This tool improves on the conventional biopsy needle by introducing an impedance sensor on the biopsy tool which is housed in a sliding sheath. Due to the significant difference in the electrical conductivity of the tumor and the healthy tissue, the sensor is able to distinguish between the two and locate the exact tumor interface. The protective sheath placed around the instrumented biopsy tool and above the interface isolates the healthy tissue and prevents or at least minimizes the transfer of tumor cells. Delivering an RF dose through the sheath can kill any malignant cells that might be lurking around the interface. This thesis, in particular, will concentrate on the development of the design, fabrication and calibration of the impedance sensor and its integration with the biopsy tool. The impedance sensor essentially consists of conductive electrodes sandwiched between insulating layers. They are built on thin-film polymer, Polyimide, using conventional microfabrication techniques. These sensors are further calibrated to estimate the cell constant. Once calibrated, these probes are used to measure the conductivity of porcine tissues, and in-house prepared agar phantoms.