Browsing by Author "Ning, P."

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    Compact Grating Interferometer For Producing Photoresist Gratings with Incoherent-Light
    Post, Daniel; Patorski, K.; Ning, P. (Optical Society of America, 1987)
    An achromatic interferometer was developed to produce 1200-lines/mm crossed-line photoresist gratings with a mercury arc light source. It is a compact reflection system of outstanding stability. Alignment procedures are described. The most stringent requirement, coplanar alignment of two folding gratings, was accomplished with the aid of a Twyman-Green interferometer. The grating interferometer produced crossed-line photoresist gratings with first-order diffraction efficiency exceeding 20%.