Browsing by Author "Zhu, Yongfei"
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- Metalorganic chemical vapor deposition of layered structure oxides(United States Patent and Trademark Office, 1996-06-18)A method of fabricating high quality layered structure oxide ferroelectric thin films. The deposition process is a chemical vapor deposition process involving chemical reaction between volatile metal organic compounds of various elements comprising the layered structure material to be deposited, with other gases in a reactor, to produce a nonvolatile solid that deposits on a suitably placed substrate such as a conducting, semiconducting, insulating, or complex integrated circuit substrate. The source materials for this process may include organometallic compounds such as alkyls, alkoxides, .beta.-diketonates or metallocenes of each individual element comprising the layered structure material to be deposited and oxygen. Preferably, the reactor in which the deposition is done is either a hot wall or a cold wall reactor and the vapors are introduced into this reactor either through a set of bubblers or through a direct liquid injection system. The ferroelectric films can be used for device applications such as in capacitors, dielectric resonators, heat sensors, transducers, actuators, nonvolatile memories, optical waveguides and displays.
- Size effects of 0.8SrBi(2)Ta(2)O(9)-0.2Bi(3)TiNbO(9) thin filmsZhu, Jinsong; Zhang, Xubai; Zhu, Yongfei; Desu, Seshu B. (American Institute of Physics, 1998-02-01)The size effects of 0.8SrBi(2)Ta(2)O(9)-0.2Bi(3)TiNbO(9) thin films, prepared by metalorganic deposition technique, were studied by determining how the ferroelectric properties vary with film thickness and grain size. It was found that the ferroelectric properties were determined by the grain size, and not by the thickness of the film in our studied thickness range of 80-500 nm. A 80 nm thick film showed good ferroelectric properties similar to the 500 nm thick film. The possible mechanisms for the size effects in SBT-BTN films are discussed. (C) 1998 American Institute of Physics. [S0021-8979(98)06502-5].