Method Of Multiple References For 3D Imaging with Fourier Transform Interferometry

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TR Number
Date
2010-03-01
Journal Title
Journal ISSN
Volume Title
Publisher
Optical Society of America
Abstract

This letter presents an improved phase referencing technique, called Method of Multiple References, for optical profilometry. Based on a lookup table, the method eliminates several major drawbacks of single-reference Fourier Transform Interferometry by enabling surface error correction for steep slopes and step discontinuities, and by allowing mapping of multiple discrete objects using a single image set. The algorithm is tested using a fiber optic coupler-based FTI system and shown to have RMS surface error less than 0.03mm. (C) 2010 Optical Society of America

Description
Keywords
Phase unwrapping algorithm, Profilometry
Citation
Evan Lally, Jianmin Gong, and Anbo Wang, "Method of multiple references for 3D imaging with Fourier transform interferometry," Opt. Express 18, 17591-17596 (2010). doi: 10.1364/OE.18.017591