Reactive ion etching of lead zirconate titanate and ruthenium oxide thin films

dc.contributor.assigneeCedraeus Incorporateden
dc.contributor.assigneeVirginia Tech Intellectual Properties, Inc.en
dc.contributor.assigneeSharp Kabushiki Kaishaen
dc.contributor.departmentElectrical and Computer Engineeringen
dc.contributor.departmentMaterials Science and Engineering (MSE)en
dc.contributor.inventorDesu, Seshu B.en
dc.contributor.inventorPan, Weien
dc.contributor.inventorVijay, Dilip P.en
dc.date.accessed2016-08-19en
dc.date.accessioned2016-08-24T17:53:45Zen
dc.date.available2016-08-24T17:53:45Zen
dc.date.filed1993-06-10en
dc.date.issued1996-03-05en
dc.description.abstractA method of reactive ion etching both a lead zirconate titanate ferroelectric dielectric and a RuO.sub.2 electrode, and a semiconductor device produced in accordance with such process. The dielectric and electrode are etched in an etching gas of O.sub.2 mixed with either CClF.sub.2 or CHClFCF.sub.3.en
dc.format.mimetypeapplication/pdfen
dc.identifier.applicationnumber8075059en
dc.identifier.patentnumber5496437en
dc.identifier.urihttp://hdl.handle.net/10919/72309en
dc.identifier.urlhttp://pimg-fpiw.uspto.gov/fdd/37/964/054/0.pdfen
dc.language.isoenen
dc.publisherUnited States Patent and Trademark Officeen
dc.subject.cpcH01L28/60en
dc.subject.cpcH01L21/31116en
dc.subject.cpcH01L21/31122en
dc.subject.cpcH01L21/32136en
dc.subject.cpcH01L31/1884en
dc.subject.cpcY02E10/50en
dc.subject.uspc216/6en
dc.subject.uspcother216/76en
dc.subject.uspcother257/E21.011en
dc.subject.uspcother257/E21.252en
dc.subject.uspcother257/E21.253en
dc.subject.uspcother257/E21.311en
dc.subject.uspcother438/3en
dc.subject.uspcother438/722en
dc.titleReactive ion etching of lead zirconate titanate and ruthenium oxide thin filmsen
dc.typePatenten
dc.type.dcmitypeTexten
dc.type.patenttypeutilityen

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