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Improvement in the electrical properties in Pt/Pb(Zr0.52Ti0.48)O-3/Pt ferroelectric capacitors using a wet cleaning method

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dc.contributorVirginia Tech. Department of Materials Science and Engineeringen
dc.contributorSamsung Advanced Institute of Technology. Material and Device Sectoren
dc.contributorSamsung Electronics Company. Semiconductor R&D Centeren
dc.contributor.authorLee, June K.en
dc.contributor.authorPark, Youngsooen
dc.contributor.authorChung, Ilsuben
dc.contributor.authorOh, Sang Jeongen
dc.contributor.authorJung, Dong J.en
dc.contributor.authorSong, Yoon J.en
dc.contributor.authorKoo, Bon J.en
dc.contributor.authorLee, Sung Y.en
dc.contributor.authorKim, Kinamen
dc.contributor.authorDesu, Seshu B.en
dc.contributor.departmentMaterials Science and Engineering (MSE)en
dc.date.accessed2015-04-24en
dc.date.accessioned2015-05-21T19:47:32Zen
dc.date.available2015-05-21T19:47:32Zen
dc.date.issued1999-12-01en
dc.description.abstractA wet cleaning solution was designed to specifically eliminate nonferroelectric phases, such as pyrochlore, PbO, and the etching damaged layer. Scanning electron microscopy pictures clearly showed that treatment with the cleaning solution completely removed these nonferroelectric phases. After removing the nonferroelectric phases, ferroelectric properties such as remnant polarization, coercive voltage, and leakage current, were remarkably improved. In addition, the wet cleaned ferroelectric capacitors yielded superior endurance against hydrogen-induced damage compared to those of the noncleaned capacitors. (C) 1999 American Institute of Physics. [S0021-8979(99)02622-5].en
dc.format.extent7 pagesen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationLee, J. K., Park, Y., Chung, I., Oh, S. J., Jung, D. J., Song, Y. J., Koo, B. J., Lee, S. Y., Kim, K., Desu, S. B. (1999). Improvement in the electrical properties in Pt/Pb(Zr0.52Ti0.48)O-3/Pt ferroelectric capacitors using a wet cleaning method. Journal of Applied Physics, 86(11), 6376-6381. doi: 10.1063/1.371700en
dc.identifier.doihttps://doi.org/10.1063/1.371700en
dc.identifier.issn0021-8979en
dc.identifier.urihttp://hdl.handle.net/10919/52490en
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/86/11/10.1063/1.371700en
dc.language.isoen_USen
dc.publisherAmerican Institute of Physicsen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectCapacitorsen
dc.subjectElectrical propertiesen
dc.subjectEtchingen
dc.subjectLeakage currentsen
dc.subjectPolarizationen
dc.titleImprovement in the electrical properties in Pt/Pb(Zr0.52Ti0.48)O-3/Pt ferroelectric capacitors using a wet cleaning methoden
dc.title.serialJournal of Applied Physicsen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten

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