Fundamental mechanisms of focused ion beam guided anodization

This paper is focused on understanding the fundamental mechanisms of focused ion beam guided anodization and the unique capabilities of generating new patterns based on such an understanding. By designing proper interpore distance, pore arrangement, and pore shape during focused ion beam patterning, nonspherical pore shape and nonhexagonal patterns can be obtained by further anodization. The electrical field and the mechanical stress field around each focused ion beam patterned concave dictate the pore formation and growth. The oxide barrier layer thickness and shape around the focused ion beam guided pores affect new pore formation and the meshing of different size pores. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3500513]