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Multi-cavity Fabry-Perot interferometric thin-film sensor with built-in temperature compensation

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dc.contributor.assigneeVirginia Tech Intellectual Properties, Inc.en
dc.contributor.inventorWang, Anboen
dc.contributor.inventorZhang, Yan Ryanen
dc.contributor.inventorCooper, Kristie L.en
dc.date.accessed2016-08-19en
dc.date.accessioned2016-08-24T17:54:48Zen
dc.date.available2016-08-24T17:54:48Zen
dc.date.filed2006-04-28en
dc.date.issued2009-02-24en
dc.description.abstractA fiber optic sensor includes at least two Fabry-Perot (FP cavities) defined by at least three partially reflecting surfaces which individually and together are capable of generating different interference spectra which are affected by temperature. One of the FP cavities is formed at an end of the sensor and includes a surface which is capable of supporting a thin film, the optical thickness of which is to be measured. The other FP cavity between the lead-in fiber and the first FP cavity thus does not include the film and can thus independently provide highly accurate temperature information for calibrating the optical length of the second FP cavity and compensation for temperature effects on measurement of the thin film supported thereon, preferably by subtraction of a calibrated temperature-dependent change in optical length of the second FP cavity from the measurement made.en
dc.format.mimetypeapplication/pdfen
dc.identifier.applicationnumber11413119en
dc.identifier.patentnumber7495772en
dc.identifier.urihttp://hdl.handle.net/10919/72595en
dc.identifier.urlhttp://pimg-fpiw.uspto.gov/fdd/72/957/074/0.pdfen
dc.language.isoen_USen
dc.publisherUnited States Patent and Trademark Officeen
dc.subject.cpcG01B11/0675en
dc.subject.cpcG01N21/45en
dc.subject.cpcG01N21/7746en
dc.subject.cpcG01B2290/25en
dc.subject.cpcG01N21/39en
dc.subject.cpcG01N2021/7773en
dc.subject.cpcG01N2021/7779en
dc.subject.uspc356/503en
dc.subject.uspcother356/480en
dc.subject.uspcother356/519en
dc.subject.uspcother356/630en
dc.titleMulti-cavity Fabry-Perot interferometric thin-film sensor with built-in temperature compensationen
dc.typePatenten
dc.type.dcmitypeTexten
dc.type.patenttypeutilityen

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