Vacuum response and gas leak detection in piezoelectrically driven sound-resonance cavity

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dc.contributorVirginia Techen
dc.contributor.authorDong, Shuxiangen
dc.contributor.authorBai, Feimingen
dc.contributor.authorYan, Lien
dc.contributor.authorCao, Huen
dc.contributor.authorLi, Jiefangen
dc.contributor.authorViehland, Dwight D.en
dc.contributor.departmentMaterials Science and Engineering (MSE)en
dc.date.accessed2014-01-24en
dc.date.accessioned2014-02-03T15:57:19Zen
dc.date.available2014-02-03T15:57:19Zen
dc.date.issued2004-05-01en
dc.description.abstractIt has been found that a piezoelectrically driven sound-resonance cavity (PSRC) is quite sensitive to low-pressure changes: a change from ambient to vacuum (67 Pa) conditions results in a 89degrees phase shift and a -81% voltage decrease. Under vacuum conditions, the PSRC is highly sensitive (similar to7 ppm) to leakage of H-2 gas. (C) 2004 American Institute of Physics.en
dc.format.mimetypeapplication/pdfen
dc.identifier.citationDong, SX; Bai, FM; Yan, L; et al., "Vacuum response and gas leak detection in piezoelectrically driven sound-resonance cavity," Appl. Phys. Lett. 84, 4144 (2004); http://dx.doi.org/10.1063/1.1751217en
dc.identifier.doihttps://doi.org/10.1063/1.1751217en
dc.identifier.issn0003-6951en
dc.identifier.urihttp://hdl.handle.net/10919/25282en
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/apl/84/21/10.1063/1.1751217en
dc.language.isoen_USen
dc.publisherAIP Publishingen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectSensorsen
dc.subjectPhysicsen
dc.titleVacuum response and gas leak detection in piezoelectrically driven sound-resonance cavityen
dc.title.serialApplied Physics Lettersen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten

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