Temperature-time transformation diagram for Pb(Zr,Ti)O-3 thin films

TR Number
Date
2011-07-01
Journal Title
Journal ISSN
Volume Title
Publisher
American Institute of Physics
Abstract

In this paper, we describe an analytical model to define the temperature-time-transformation (TTT) diagram of sol-gel deposited Pb(Zr,Ti)O-3 thin films on platinized silicon substrates. Texture evolution in film occurred as the pyrolysis and thermal annealing conditions were varied. We demonstrate that the developed model can quantitatively predict the outcome of thermal treatment conditions in terms of texture evolution. Multinomial and multivariate regression techniques were utilized to create the predictor models for TTT data. Further, it was found that multinomial regression can provide better fit as compared to standard regression and multivariate regression. We have generalized this approach so that it can be applied to other thin film deposition techniques and bulk ceramics. (C) 2011 American Institute of Physics. [doi:10.1063/1.3606433]

Description
Keywords
Annealing, Pyrolysis, Thin film texture, X-ray diffraction, Thin film deposition
Citation
Varghese, Ronnie, Williams, Matthew, Gupta, Shashaank, Priya, Shashank (2011). Temperature-time transformation diagram for Pb(Zr,Ti)O-3 thin films. Journal of Applied Physics, 110(1). doi: 10.1063/1.3606433