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Quantitative analysis of fiber texture in cubic films

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dc.contributorVirginia Tech. Department of Materials Engineeringen
dc.contributor.authorRao, Satish I.en
dc.contributor.authorHouska, Charles R.en
dc.contributor.departmentMaterials Science and Engineering (MSE)en
dc.date.accessed2015-04-24en
dc.date.accessioned2015-05-21T19:47:26Zen
dc.date.available2015-05-21T19:47:26Zen
dc.date.issued1983en
dc.description.abstractThe method of Roe and Krigbaum for determining fiber texture has been extended to thin film applications. It is often desirable to make i n s i t u pole density measurements of a film on a thick substrate. This does not permit complete data to be collected by x‐ray transmission techniques. If the data are restricted to the range 0≤χ≤75°, obtained by reflection, incomplete pole density plots are obtained, and it is necessary to devise a self‐consistent extrapolation technique that extends the pole density data to 90°. This requires least‐squares fitting over the range from χ=0 to 75° and an iterative procedure for extrapolating with functions consistent with a single orientation function. The example of a 1.14‐μ Mo film on a (111) Si substrate requires an expansion of the symmetry relations to order 46. The procedure established herein is readily extended to include the effect of static displacements resulting from embedded gas atoms that are associated with sputtered films.en
dc.description.sponsorshipNational Science Foundation (U.S.) - Grant No. DMR-S000933en
dc.format.extent12 pagesen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationRao, S., Houska, C. R. (1983). Quantitative analysis of fiber texture in cubic films. Journal of Applied Physics, 54(4), 1872-1882. doi: 10.1063/1.332240en
dc.identifier.doihttps://doi.org/10.1063/1.332240en
dc.identifier.issn0021-8979en
dc.identifier.urihttp://hdl.handle.net/10919/52439en
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/54/4/10.1063/1.332240en
dc.language.isoen_USen
dc.publisherAmerican Institute of Physicsen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectThin film textureen
dc.subjectDensity measurementen
dc.subjectMolybdenumen
dc.subjectSputter depositionen
dc.titleQuantitative analysis of fiber texture in cubic filmsen
dc.title.serialJournal of Applied Physicsen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten

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