Comparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodes

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dc.contributorVirginia Tech. Department of Materials Science and Engineeringen
dc.contributorEcole PoIytechnique Federale de Lausanne. Laboratoire de Ceramique, MX-Den
dc.contributor.authorBursill, Les A.en
dc.contributor.authorReaney, Ian M.en
dc.contributor.authorVijay, Dilip P.en
dc.contributor.authorDesu, Seshu B.en
dc.contributor.departmentMaterials Science and Engineering (MSE)en
dc.date.accessed2015-04-24en
dc.date.accessioned2015-05-21T19:47:30Zen
dc.date.available2015-05-21T19:47:30Zen
dc.date.issued1994-02-01en
dc.description.abstractHigh-resolution and bright- and dark-field transmission electron microscopy are used to characterize and compare the interface structures and microstructure of PZT/RuO2/SiO2/Si and PZT/Pt/Ti/SiO2/Si ferroelectric thin films, with a view to understanding the improved fatigue characteristics of PZT thin films with RuO2 electrodes. The RuO2/PZT interface consists of a curved pseudoperiodic minimal surface. The interface is chemically sharp with virtually no intermixing of RuO2 and PZT, as evidenced by the atomic resolution images as well as energy dispersive x-ray analysis. A nanocrystalline pyrochlore phase Pb2ZrTiO7-x, x not equal 1, was found on the top surface of the PZT layer. The PZT/Pt/Ti/SiO2/Si thin film was well crystallized and showed sharp interfaces throughout. Possible reasons for the improved fatigue characteristics of PZT/RuO2/SiO2/Si thin films are discussed.en
dc.description.sponsorshipSwiss National Funds for Researchen
dc.description.sponsorshipAustralian Research Councilen
dc.format.extent6 pagesen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationBursill, L. A., Reaney, I. M., Vijay, D. P., & Desu, S. B. (1994). Comparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodes. Journal of Applied Physics, 75(3), 1521-1525. doi: doi:http://dx.doi.org/10.1063/1.356388en
dc.identifier.doihttps://doi.org/10.1063/1.356388en
dc.identifier.issn0021-8979en
dc.identifier.urihttp://hdl.handle.net/10919/52468en
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/75/3/10.1063/1.356388en
dc.language.isoen_USen
dc.publisherAmerican Institute of Physicsen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectLead zirconate titanateen
dc.subjectFerroelectric thin filmsen
dc.subjectElectrodesen
dc.subjectMicrostructural propertiesen
dc.subjectThin film structureen
dc.titleComparison of lead zirconate titanate thin films on ruthenium oxide and platinum electrodesen
dc.title.serialJournal of Applied Physicsen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten

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