Characterization and elimination of dry etching damaged layer in Pt/Pb(Zr0.53Ti0.47)O-3/Pt ferroelectric capacitor

dc.contributorVirginia Techen
dc.contributor.authorLee, J. K.en
dc.contributor.authorKim, T. Y.en
dc.contributor.authorChung, Ilsuben
dc.contributor.authorDesu, Seshu B.en
dc.contributor.departmentMaterials Science and Engineering (MSE)en
dc.date.accessed2014-03-27en
dc.date.accessioned2014-04-16T14:16:39Zen
dc.date.available2014-04-16T14:16:39Zen
dc.date.issued1999-07-01en
dc.description.abstractThe damage of Pb(Zr0.53Ti0.47)O-3 thin film due to dry etching process was characterized in terms of the microstructure and electrical properties. The damaged layer seems to be amorphous and the thickness of the damaged layer is about 10 nm. The existence of such a layer in Pt/Pb(Zr0.53Ti0.47)O-3/Pt ferroelectric capacitor tends to increase the coercive voltage and the leakage current. The damaged layer was not fully reverted to perovskite phase by the thermal annealing. With the wet cleaning treatment, however, the damaged layer was successfully removed thereby revealing significantly improved electrical properties. (C) 1999 American Institute of Physics. [S0003-6951(99)00529-X].en
dc.format.mimetypeapplication/pdfen
dc.identifier.citationLee, JK; Kim, TY; Chung, I; et al., "Characterization and elimination of dry etching damaged layer in Pt/Pb(Zr0.53Ti0.47)O-3/Pt ferroelectric capacitor," Appl. Phys. Lett. 75, 334 (1999); http://dx.doi.org/10.1063/1.124367en
dc.identifier.doihttps://doi.org/10.1063/1.124367en
dc.identifier.issn0003-6951en
dc.identifier.urihttp://hdl.handle.net/10919/47369en
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/apl/75/3/10.1063/1.124367en
dc.language.isoen_USen
dc.publisherAIP Publishingen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectElectrical propertiesen
dc.subjectThin filmsen
dc.titleCharacterization and elimination of dry etching damaged layer in Pt/Pb(Zr0.53Ti0.47)O-3/Pt ferroelectric capacitoren
dc.title.serialApplied Physics Lettersen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten
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