Piezoelectric MEMS for energy harvesting

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dc.contributor.authorKim, Sang-Gooken
dc.contributor.authorPriya, Shashanken
dc.contributor.authorKanno, Isakuen
dc.date.accessed2014-07-15en
dc.date.accessioned2014-07-21T15:49:40Zen
dc.date.available2014-07-21T15:49:40Zen
dc.date.issued2012-11en
dc.description.abstractPiezoelectric microelectromechanical systems (MEMS) have been proven to be an attractive technology for harvesting small magnitudes of energy from ambient vibrations. This technology promises to eliminate the need for replacing chemical batteries or complex wiring in microsensors/microsystems, moving us closer toward battery-less autonomous sensors systems and networks. To achieve this goal, a fully assembled energy harvester the size of a US quarter dollar coin (diameter = 24.26 mm, thickness = 1.75 mm) should be able to robustly generate about 100 mu W of continuous power from ambient vibrations. In addition, the cost of the device should be sufficiently low for mass scale deployment. At the present time, most of the devices reported in the literature do not meet these requirements. This article reviews the current state of the art with respect to the key challenges such as high power density and wide bandwidth of operation. This article also describes improvements in piezoelectric materials and resonator structure design, which are believed to be the solutions to these challenges. Epitaxial growth and grain texturing of piezoelectric materials is being developed to achieve much higher energy conversion efficiency. For embedded medical systems, lead-free piezoelectric thin films are being developed, and MEMS processes for these new classes of materials are being investigated. Nonlinear resonating beams for wide bandwidth resonance are also being developed to enable more robust operation of energy harvesters.en
dc.description.sponsorshipOffice of Basic Energy Sciences, Department of Energy (#DE-FG0207ER46480) and (DE-FG0209ER46577)en
dc.description.sponsorshipAFOSR Young Investigator Programen
dc.description.sponsorshipDARPA Grant (HR0011-06-1-0045)en
dc.description.sponsorshipMIT-Iberian Nanotechnology Laboratory Programen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationKim, S. G.; Priya, S.; Kanno, I., "Piezoelectric MEMS for energy harvesting," MRS Bulletin. 37(11), 1039-1050, 2012. DOI: 10.1557/mrs.2012.275en
dc.identifier.doihttps://doi.org/10.1557/mrs.2012.275en
dc.identifier.issn0883-7694en
dc.identifier.urihttp://hdl.handle.net/10919/49645en
dc.identifier.urlhttp://journals.cambridge.org/action/displayFulltext?type=1&fid=8739835&jid=MRS&volumeId=37&issueId=11&aid=8739833&bodyId=&membershipNumber=&societyETOCSession=en
dc.language.isoen_USen
dc.publisherCambridge University Pressen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectthin-filmsen
dc.subjectelectrical-propertiesen
dc.subjectpower-generationen
dc.subjectsingle-crystalsen
dc.subjectfabricationen
dc.subjectdesignen
dc.subjectPerformanceen
dc.subjectdepositionen
dc.subjectefficiencyen
dc.subjectceramicsen
dc.subjectmaterials science, multidisciplinaryen
dc.subjectphysics, applieden
dc.titlePiezoelectric MEMS for energy harvestingen
dc.title.serialMRS Bulletinen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten

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Strategic Growth Area: Economical and Sustainable Materials (ESM)