Processing of PbTiO3 thin films. I. in situ investigation of formation kinetics

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dc.contributorVirginia Techen
dc.contributor.authorLi, C. C.en
dc.contributor.authorDesu, Seshu B.en
dc.contributor.departmentMaterials Science and Engineering (MSE)en
dc.date.accessed2014-05-09en
dc.date.accessioned2014-05-14T13:35:39Zen
dc.date.available2014-05-14T13:35:39Zen
dc.date.issued1996-01-01en
dc.description.abstractA novel in situ stress measurement technique to study the formation kinetics of multicomponent oxide thin films was developed and was applied to PbTiO3. Single phase PbTiO3 thin films were formed from the reaction between films in the deposited PbO/TiO2 multilayer. The film. stoichiometry was accurately controlled by depositing individual layers with the required thickness. The development of film stresses associated with the formation of the product layer at the PbO/TiO2 interface of the multilayers was used to monitor the growth rate of the PbTiO3 layer. It was found that growth of the PbTiO3 phase obeyed the parabolic law, and the effective activation energy was estimated to be 108 kJ/mole. It is believed that the mechanism of this reaction was dominated by grain boundary diffusion of the participating cations. (C) 1996 American Vacuum Society.en
dc.description.sponsorshipDefense Advanced Research Agency (DARPA) through a project from the Office of Naval Researchen
dc.description.sponsorshipCenter for Advanced Ceramic Materials at Virginia Techen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationLi, C. C.; Desu, S. B., "Processing of PbTiO3 thin films. I. In situ investigation of formation kinetics," J. Vac. Sci. Technol. A 14, 1 (1996); http://dx.doi.org/10.1116/1.579919en
dc.identifier.doihttps://doi.org/10.1116/1.579919en
dc.identifier.issn0734-2101en
dc.identifier.urihttp://hdl.handle.net/10919/47987en
dc.identifier.urlhttp://scitation.aip.org/content/avs/journal/jvsta/14/1/10.1116/1.579919en
dc.language.isoen_USen
dc.publisherAmerican Institute of Physicsen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectMaterials science, coatings & filmsen
dc.subjectPhysics, applieden
dc.titleProcessing of PbTiO3 thin films. I. in situ investigation of formation kineticsen
dc.title.serialJournal of Vacuum Science & Technology a-Vacuum Surfaces and Filmsen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten

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