Low-temperature co-firing of multilayer textured piezoelectric ceramics with inner electrodes

dc.contributor.assigneeVirginia Tech Intellectual Properties, Inc.en
dc.contributor.inventorYan, Yongkeen
dc.contributor.inventorPriya, Shashanken
dc.date.accessed2021-03-23en
dc.date.accessioned2021-03-25T18:15:46Zen
dc.date.available2021-03-25T18:15:46Zen
dc.date.filed2013-02-01en
dc.date.issued2019-03-05en
dc.description.abstractTextured PMN-PZT fabricated by templated grain growth (TGG) method has a piezoelectric coefficient (d) of 3 to 5 times that of its random counterpart. By combining this TGG method with low-temperature co-firing ceramics (LTCC) techniques, co-fired multilayer textured piezoelectric ceramic materials with inner electrodes were produced at a temperature as low as 925° C., which silver could be used. Trilayer PMN-PZT ceramics prepared by this method show a strain increase of 2.5 times, a driving voltage decrease of 3 times, and an equivalent piezoelectric coefficient (d*) improvement of 10 to 15 times that of conventional random ceramic counterparts. Further, a co-fired magnetostrictive/piezoelectric/magnetostrictive laminate structure with silver inner electrode was also synthesized. The integration of textured piezoelectric microstructure with the cost-effective low-temperature co-fired layered structure achieves strong magnetoelectric coupling. These new materials have promising applications including as actuators, ultrasonic transducers, and use in energy harvesters.en
dc.format.mimetypeapplication/pdfen
dc.identifier.applicationnumber14376319en
dc.identifier.patentnumber10224476en
dc.identifier.urihttp://hdl.handle.net/10919/102844en
dc.identifier.urlhttp://pimg-fpiw.uspto.gov/fdd/76/244/102/0.pdfen
dc.languageenen
dc.publisherUnited States Patent and Trademark Officeen
dc.subject.cpcC04B35/26en
dc.subject.cpcC04B35/493en
dc.subject.cpcC04B35/499en
dc.subject.cpcC04B35/64en
dc.subject.cpcC04B2235/3234en
dc.subject.cpcC04B2235/3236en
dc.subject.cpcC04B2235/3249en
dc.subject.cpcC04B2235/3279en
dc.subject.cpcC04B2235/3281en
dc.subject.cpcC04B2235/3284en
dc.subject.cpcC04B2235/787en
dc.subject.cpcH01L41/20en
dc.subject.cpcH01L41/0477en
dc.subject.cpcH01L41/083en
dc.subject.cpcH01L41/16en
dc.subject.cpcH01L41/1875en
dc.subject.cpcH01L41/273en
dc.subject.cpcH01L41/43en
dc.titleLow-temperature co-firing of multilayer textured piezoelectric ceramics with inner electrodesen
dc.typePatenten
dc.type.dcmitypeTexten
dc.type.patenttypeutilityen

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