The measurement of elastic stresses and energy in cubic single‐crystal films by x‐ray diffraction

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dc.contributorVirginia Tech. Department of Materials Engineeringen
dc.contributor.authorRao, Satish I.en
dc.contributor.authorHouska, Charles R.en
dc.contributor.departmentMaterials Science and Engineering (MSE)en
dc.date.accessed2015-04-24en
dc.date.accessioned2015-05-21T19:47:27Zen
dc.date.available2015-05-21T19:47:27Zen
dc.date.issued1981en
dc.description.abstractAnisotropicelasticity calculations have been made for use in conjunction with strain measurements by x‐ray diffraction for sputtered single‐crystal films. Only the cubic case has been treated. Data from InSb films with (100) and (111) orientations on similarly oriented GaAs substrates are given. It was found that nearly alike planar strains ε yield lower planar stresses σ′ 1 and σ′ 2 and stored energy density U for the (100) orientation. The (100) films exhibit a relatively large strain perpendicular to the film ε3.en
dc.description.sponsorshipNational Science Foundation (U.S.) - Grant No. DMR-8000933en
dc.format.extent7 pagesen
dc.format.mimetypeapplication/pdfen
dc.identifier.citationRao, S. I., Houska, C. R. (1981). The measurement of elastic stresses and energy in cubic single‐crystal films by x‐ray diffraction. Journal of Applied Physics, 52(10), 6322-6327. doi: 10.1063/1.328536en
dc.identifier.doihttps://doi.org/10.1063/1.328536en
dc.identifier.issn0021-8979en
dc.identifier.urihttp://hdl.handle.net/10919/52450en
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/52/10/10.1063/1.328536en
dc.language.isoen_USen
dc.publisherAmerican Institute of Physicsen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectElasticityen
dc.subjectIII-V semiconductorsen
dc.subjectStrain measurementen
dc.subjectAnisotropyen
dc.subjectSputter depositionen
dc.titleThe measurement of elastic stresses and energy in cubic single‐crystal films by x‐ray diffractionen
dc.title.serialJournal of Applied Physicsen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten

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