Compact Grating Interferometer For Producing Photoresist Gratings with Incoherent-Light
dc.contributor | Virginia Tech | en |
dc.contributor.author | Post, Daniel | en |
dc.contributor.author | Patorski, K. | en |
dc.contributor.author | Ning, P. | en |
dc.contributor.department | Biomedical Engineering and Mechanics | en |
dc.date.accessed | 2014-02-24 | en |
dc.date.accessioned | 2014-04-04T15:12:12Z | en |
dc.date.available | 2014-04-04T15:12:12Z | en |
dc.date.issued | 1987 | en |
dc.description.abstract | An achromatic interferometer was developed to produce 1200-lines/mm crossed-line photoresist gratings with a mercury arc light source. It is a compact reflection system of outstanding stability. Alignment procedures are described. The most stringent requirement, coplanar alignment of two folding gratings, was accomplished with the aid of a Twyman-Green interferometer. The grating interferometer produced crossed-line photoresist gratings with first-order diffraction efficiency exceeding 20%. | en |
dc.description.sponsorship | National Science Foundation MEA-8317879 | en |
dc.description.sponsorship | Office of Naval Research N00014-86-K-0255 | en |
dc.format.mimetype | application/pdf | en |
dc.identifier.citation | Daniel Post, Krzysztof Patorski, and Peitai Ning, "Compact grating interferometer for producing photoresist gratings with incoherent light," Appl. Opt. 26, 1100-1105 (1987). doi: 10.1364/AO.26.001100 | en |
dc.identifier.doi | https://doi.org/10.1364/AO.26.001100 | en |
dc.identifier.issn | 0003-6935 | en |
dc.identifier.uri | http://hdl.handle.net/10919/46882 | en |
dc.identifier.url | http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-26-6-1100 | en |
dc.language.iso | en_US | en |
dc.publisher | Optical Society of America | en |
dc.rights | In Copyright | en |
dc.rights.uri | http://rightsstatements.org/vocab/InC/1.0/ | en |
dc.title | Compact Grating Interferometer For Producing Photoresist Gratings with Incoherent-Light | en |
dc.title.serial | Applied Optics | en |
dc.type | Article - Refereed | en |
dc.type.dcmitype | Text | en |
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