Compact Grating Interferometer For Producing Photoresist Gratings with Incoherent-Light

dc.contributorVirginia Techen
dc.contributor.authorPost, Danielen
dc.contributor.authorPatorski, K.en
dc.contributor.authorNing, P.en
dc.contributor.departmentBiomedical Engineering and Mechanicsen
dc.date.accessed2014-02-24en
dc.date.accessioned2014-04-04T15:12:12Zen
dc.date.available2014-04-04T15:12:12Zen
dc.date.issued1987en
dc.description.abstractAn achromatic interferometer was developed to produce 1200-lines/mm crossed-line photoresist gratings with a mercury arc light source. It is a compact reflection system of outstanding stability. Alignment procedures are described. The most stringent requirement, coplanar alignment of two folding gratings, was accomplished with the aid of a Twyman-Green interferometer. The grating interferometer produced crossed-line photoresist gratings with first-order diffraction efficiency exceeding 20%.en
dc.description.sponsorshipNational Science Foundation MEA-8317879en
dc.description.sponsorshipOffice of Naval Research N00014-86-K-0255en
dc.format.mimetypeapplication/pdfen
dc.identifier.citationDaniel Post, Krzysztof Patorski, and Peitai Ning, "Compact grating interferometer for producing photoresist gratings with incoherent light," Appl. Opt. 26, 1100-1105 (1987). doi: 10.1364/AO.26.001100en
dc.identifier.doihttps://doi.org/10.1364/AO.26.001100en
dc.identifier.issn0003-6935en
dc.identifier.urihttp://hdl.handle.net/10919/46882en
dc.identifier.urlhttp://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-26-6-1100en
dc.language.isoen_USen
dc.publisherOptical Society of Americaen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.titleCompact Grating Interferometer For Producing Photoresist Gratings with Incoherent-Lighten
dc.title.serialApplied Opticsen
dc.typeArticle - Refereeden
dc.type.dcmitypeTexten

Files

Original bundle
Now showing 1 - 1 of 1
Loading...
Thumbnail Image
Name:
ao-26-6-1100.pdf
Size:
977.86 KB
Format:
Adobe Portable Document Format
Description:
Main article