Frequency-dependent stability of parallel-plate electrostatic actuators in conductive fluids

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dc.contributorVirginia Techen
dc.contributor.authorSounart, T. L.en
dc.contributor.authorPanchawagh, H. V.en
dc.contributor.authorMahajan, R. L.en
dc.date.accessed2014-01-17en
dc.date.accessioned2014-01-28T18:00:13Zen
dc.date.available2014-01-28T18:00:13Zen
dc.date.issued2010-05en
dc.description.abstractWe present an electromechanical stability analysis of passivated parallel-plate electrostatic actuators in conductive dielectric media and show that the pull-in instability can be eliminated by tuning the applied frequency below a design-dependent stability limit. A partial instability region is also obtained, where the actuator jumps from the pull-in displacement to another stable position within the gap. The results predict that the stability limit is always greater than the critical actuation frequency, and therefore any device that is feasible to actuate in a conductive fluid can be operated with stability over the full range of motion. (C) 2010 American Institute of Physics. [doi:10.1063/1.3389491]en
dc.description.sponsorshipDepartment of Energy_DE-AC04-94AL85000en
dc.identifier.citationSounart, T. L.; Panchawagh, H. V.; Mahajan, R. L., "Frequency-dependent stability of parallel-plate electrostatic actuators in conductive fluids," Appl. Phys. Lett. 96, 203505 (2010); http://dx.doi.org/10.1063/1.3389491en
dc.identifier.doihttps://doi.org/10.1063/1.3389491en
dc.identifier.issn0003-6951en
dc.identifier.urihttp://hdl.handle.net/10919/25172en
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/apl/96/20/10.1063/1.3389491en
dc.language.isoen_USen
dc.publisherAIP Publishingen
dc.rightsIn Copyrighten
dc.rights.urihttp://rightsstatements.org/vocab/InC/1.0/en
dc.subjectdielectric materialsen
dc.subjectelectrostatic actuatorsen
dc.subjectmechanical stabilityen
dc.subjectmicrofluidicsen
dc.subjectmemsen
dc.subjectdesignen
dc.subjectPhysicsen
dc.titleFrequency-dependent stability of parallel-plate electrostatic actuators in conductive fluidsen
dc.title.serialApplied Physics Lettersen
dc.typeArticle - Refereeden

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