Process for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process

dc.contributor.assignee	Virginia Tech Intellectual Properties, Inc.	en
dc.contributor.inventor	Lu, Guo-Quan	en
dc.contributor.inventor	Bang, Jaecheol	en
dc.date.accessed	2016-08-19	en
dc.date.accessioned	2016-08-24T17:54:02Z	en
dc.date.available	2016-08-24T17:54:02Z	en
dc.date.filed	1996-08-14	en
dc.date.issued	1999-01-26	en
dc.description.abstract	Processes for providing a durable glass dielectric layer on an electrically conductive substrate are disclosed. Also disclosed are electrostatic chucks made by the process that include an electrically conductive substrate coated with a layer of glass having a composition that includes 60 wt. % to 80 wt. % SiO.sub.2.	en
dc.format.mimetype	application/pdf	en
dc.identifier.applicationnumber	8700605	en
dc.identifier.patentnumber	5864459	en
dc.identifier.uri	http://hdl.handle.net/10919/72379	en
dc.identifier.url	http://pimg-fpiw.uspto.gov/fdd/59/644/058/0.pdf	en
dc.language.iso	en_US	en
dc.publisher	United States Patent and Trademark Office	en
dc.subject.cpc	H01L21/6831	en
dc.subject.cpc	H01L21/6833	en
dc.subject.cpc	H02N13/00	en
dc.subject.cpc	Y10T279/23	en
dc.subject.uspc	279/128	en
dc.subject.uspcother	361/234	en
dc.title	Process for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process	en
dc.type	Patent	en
dc.type.dcmitype	Text	en
dc.type.patenttype	utility	en

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