Scholarly Works, Materials Science and Engineering (MSE)

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Browsing Scholarly Works, Materials Science and Engineering (MSE) by Author "Adler, Thomas"

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    Affect of annealing on uniform and nonuniform strains in a sputtered Mo film on Si
    Adler, Thomas; Houska, Charles R. (American Institute of Physics, 1979)
    Sputtered films of 1.5 μm of Mo deposited on (111) ‐oriented Si failed either by blistering or localized eruptions after various thermal treatments. Investigations were carried out to determine the amount of strain in the film associated with this unstable mechanical behavior. Two types of measurements were employed. One employs macroscopic interferometer measurements to measure deflection and the other x‐ray diffraction. A separation is made of intrinsic and thermally induced strains. The intrinsic strains are believed to be due mainly to Ar atoms embedded during sputtering which remain throughout annealing treatments. These atoms also introduce a broadening of the diffraction lines because of the special constraints associated within films. This effect is separated from the usual line broadening due to dislocations and small particle size. Annealing treatments reconfirm that dislocation mechanisms are not as effective in relieving nonuniform microstrain in films as they are in cold‐work filings of the same material.
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    Simplifications in the x‐ray line‐shape analysis
    Adler, Thomas; Houska, Charles R. (American Institute of Physics, 1979)
    It is shown that a Fourier series associated with the Warren‐Averbach line‐shape analysis can be fitted with only five parameters to a pair of peaks. These interrelate the Fourier coefficients and thereby provide a simplified series which has been applied to the study of a Mo film on a Si crystal. The parameters include the average particle size, the first neighbor rms strain, a term which gives the variation in rms strain with cell separation, and two instrumental broadening coefficients. Although considerable simplification is possible, equivalent information can be obtained as compared with the original analysis and the ’’hook effect’’ is eliminated in the fitted coefficients.